Polishing Member Profile Estimation via Sliding Distance Simulation
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Solution Overview
Problem
Current methods for obtaining the profile of a polishing member in chemical-mechanical polishing processes are time-consuming and costly, requiring actual measurement, which can lead to variations in polishing rates and potential polishing failures due to inadequate dressing operations.
Innovation Solution
A method involving simulation to calculate the sliding-distance distribution of a dresser on a polishing member, using correction coefficients to account for surface unevenness and friction, allowing for the estimation of the polishing member's profile and evaluation of dressing quality without physical measurement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If actual measurement methods are used to obtain the profile of the polishing member, then measurement accuracy is improved, but time consumption and cost increase
Solution Approach 1:
The patent creates a virtual copy of the polishing member through simulation, calculating the sliding distance distribution of the dresser on the polishing member surface. This virtual model replicates the essential characteristics needed for profile evaluation, eliminating the need for time-consuming physical measurements while maintaining sufficient accuracy for dressing operation assessment
Solution Approach 2:
The patent replaces the mechanical measurement system with a computational simulation system. Instead of using physical measurement instruments to obtain profile data, the system uses computer-based calculations to determine the sliding distance distribution, which serves as a proxy for the actual profile characteristics
2Measurement precision
If actual measurement methods are used to obtain the profile of the polishing member, then measurement accuracy is improved, but manufacturing cost increases
Solution Approach 1:
The patent creates a virtual copy of the polishing member through simulation, calculating the sliding distance distribution of the dresser on the polishing member surface. This virtual model replicates the essential characteristics needed for profile evaluation, eliminating the need for time-consuming physical measurements while maintaining sufficient accuracy for dressing operation assessment
Solution Approach 2:
The patent replaces the mechanical measurement system with a computational simulation system. Instead of using physical measurement instruments to obtain profile data, the system uses computer-based calculations to determine the sliding distance distribution, which serves as a proxy for the actual profile characteristics
3Device complexity
If dressing operations are not performed appropriately, then device complexity is reduced, but polishing reliability deteriorates due to surface undulation
Solution Approach 1:
The patent implements a feedback mechanism where the calculated sliding distance distribution is used to evaluate the dressing operation results. This evaluation provides information about surface uniformity and dresser contact patterns, enabling adjustment of dressing parameters to achieve consistent, high-quality polishing results and prevent variations in polishing rate
Solution Approach 2:
The patent performs preliminary calculation of the sliding distance distribution before actual polishing to evaluate whether the dressing operation has achieved the desired surface characteristics. This allows for optimization of dressing conditions in advance, ensuring reliable polishing performance without requiring complex real-time adjustments during polishing
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach provides a more accurate and efficient method for evaluating dressing operations, reducing the risk of polishing failures by simulating the sliding-distance distribution and surface dressing conditions, thereby improving the consistency and quality of the polishing process.
Implementation Method 1
a dresser, having a number of abrasive grains, such as diamond particles, electrodeposited thereon, is used to dress (condition) the surface of the polishing member to regenerate fine irregularities on the surface of the polishing member
Data Source
AI summary
The method includes: calculating an increment of a sliding distance of a dresser by multiplying a relative speed between the dresser and a polishing member by a contact time between them; correcting the increment of the sliding distance by multiplying the calculated increment of the sliding distance by at least one correction coefficient; calculating the sliding distance by repeatedly adding the corrected increment of the sliding distance to the sliding distance according to elapse of time; and producing the sliding-distance distribution of the dresser from the obtained sliding distance and a position of a sliding-distance calculation point. The at least one correction coefficient includes an unevenness correction coefficient provided for the sliding-distance calculation point. The unevenness correction coefficient is a correction coefficient that allows a profile of the polishing member to reflect a difference between an amount of scraped material of the polishing member in its raised portion and an amount of scraped material of the polishing member in its recess portion.