Polishing Dresser Pressure Controller for Stable Force

The calibration data establishing the relationship between gas pressure and pressing force is obtained in advance during apparatus setup or maintenance periods. This pre-acquired calibration information is stored and reused during normal polishing operations, eliminating the need to stop the polishing apparatus for calibration purposes while maintaining measurement precision.

The patent replaces direct mechanical measurement of pressing force with a pneumatic system that uses gas pressure control. By measuring and controlling the gas pressure in the pneumatic cylinder rather than directly measuring the mechanical pressing force, the system achieves accurate pressing force control without requiring the polishing apparatus to stop for calibration during operation.

The patent changes the control parameter from direct mechanical force application to gas pressure control. By using a pneumatic cylinder with controllable gas pressure, the system can generate and maintain stable pressing forces. The gas pressure can be precisely regulated to produce the required pressing force, and the compressibility of gas provides natural damping that enhances stability, especially at low pressing forces where mechanical systems often exhibit instability.

The patent employs a pneumatic cylinder to generate the pressing force on the polishing pad. The pneumatic system uses compressed gas to create controlled pressing forces, replacing direct mechanical actuation. This pneumatic approach provides smooth, stable force generation with excellent controllability, particularly for low pressing forces, due to the compressible nature of gas and the ability to precisely regulate gas pressure.