Polishing Head Leak Detection Without Removal

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Solution Overview

Problem

Conventional leak checking methods for polishing apparatuses require removing the polishing head from the apparatus, leading to increased downtime and labor, and cannot detect leaks in the gas delivery lines, resulting in potential polishing failures even with properly attached membranes.

Innovation Solution

A method using pressure sensors and flowmeters integrated into the polishing apparatus to detect leaks in the compressed gas supplied to the polishing head without removing it, by measuring flow rates and pressure variations within the pressure chambers, and generating a leak-detection signal when deviations are outside a reference range.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional leak checking method is used (removing polishing head and fixing to leak checking tool), then leak detection can be performed, but apparatus downtime increases and labor burden increases

Engineering Contradiction:

Improveleak detection capabilityVSAvoidapparatus downtime

Core Design Contradiction:

ReliabilityVSLoss of time

Solution Approach 1:

The polishing head performs leak detection on itself using integrated pressure sensors and flowmeters within the polishing apparatus, eliminating the need to remove and externally test the polishing head. The system self-diagnoses leaks in the compressed gas supply system while remaining in its operational position.

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

The pressure sensor and flowmeter are designed to serve dual purposes: monitoring polishing process parameters during normal operation and detecting leaks in the compressed gas supply system. This multi-functionality eliminates the need for separate leak detection equipment and procedures.

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Reliability

If manual leak checking is performed, then leak detection is possible, but productivity decreases due to increased downtime

Engineering Contradiction:

Improveleak detection accuracyVSAvoidpolishing throughput

Core Design Contradiction:

ReliabilityVSProductivity

Solution Approach 1:

The leak detection system operates continuously during the polishing process without interrupting the workflow. Pressure and flow rate are monitored in real-time, allowing immediate detection of leaks while maintaining continuous substrate polishing, thus preserving productivity.

Inventive Principle:

Principle #20Continuity of useful action

Solution Approach 2:

The system performs preliminary leak detection by continuously monitoring pressure and flow rate parameters before they indicate a failure condition. This early warning capability allows for preventive maintenance scheduling that minimizes disruption to polishing productivity.

Inventive Principle:

Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for automatic leak checking without disrupting the polishing process, reducing worker burden and apparatus downtime, and detecting leaks in both the polishing head and gas delivery lines, ensuring consistent pressure and preventing polishing failures.

Implementation Method 1

measuring the pressure of the compressed gas in the pressure chamber

Methodology Applied

Scientific EffectPressure measurement:

Implementation Method 2

measuring flow rate of the compressed gas during supplying of the compressed gas into the pressure chamber

Methodology Applied

Scientific EffectFlow rate measurement:

Implementation Method 3

supplying a compressed gas into a pressure chamber, which is formed by a membrane of a polishing head

Methodology Applied

Scientific EffectGas containment:

Data Source

PatentUS10792784B2Leak checking method, and computer-readable storage medium for performing the leak checking method

Publication Date: 2020.10.06 EBARA CORP

AI summary

A leak checking method which is capable of detecting a leak of compressed gas supplied to a polishing head without removing the polishing head from a polishing apparatus is disclosed. The leak checking method includes: supplying a compressed gas into a pressure chamber, which is formed by a membrane of a polishing head, with the membrane placed in contact with a stationary surface; measuring a flow rate of the compressed gas during supplying of the compressed gas into the pressure chamber, while regulating a pressure of the compressed gas by use of a pressure regulator; deciding whether or not the flow rate measured when a variation in the pressure of the compressed gas is within an allowable range of variation, is within a reference range; and generating a leak-detection signal when the flow rate is outside of the reference range.