Polishing Pad Geometry Correction via Additive Manufacturing

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Solution Overview

Problem

Existing additive manufacturing systems face challenges in accurately forming polishing pads with precise geometry and planarity, leading to potential distortions in the polishing surface, which can result in uneven polishing and increased post-processing requirements.

Innovation Solution

The method involves generating a modified pattern for dispensing feed material using droplet ejection in additive manufacturing systems to compensate for distortions, ensuring the formation of polishing pads with precise geometry and planarity, including the creation of grooves and recesses, thereby improving polishing efficacy and reducing material waste.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If traditional molding or casting methods are used to fabricate polishing pads, then production efficiency is improved, but manufacturing precision and geometric accuracy deteriorate due to inherent distortion in the additive manufacturing process

Engineering Contradiction:

Improveproduction efficiencyVSAvoidgeometric accuracy

Core Design Contradiction:

ProductivityVSManufacturing precision

Solution Approach 1:

The patent applies preliminary action by pre-compensating for expected distortions in the digital model before manufacturing. The correction profile is calculated and integrated into the CAD data prior to the additive manufacturing process, allowing the distortion to be counteracted during fabrication rather than requiring post-processing corrections.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The patent utilizes parameter changes by modifying the digital geometry parameters of the polishing pad design. The correction profile adjusts key geometric parameters such as groove dimensions, pad thickness, and surface contours in the digital model to compensate for anticipated manufacturing deviations, transforming the design parameters to achieve the desired final dimensions.

Inventive Principle:

Principle #35Parameter changes

2Manufacturing precision

If post-processing is performed to correct distorted geometry, then manufacturing precision is improved, but loss of time and productivity deteriorate

Engineering Contradiction:

Improvegeometry controlVSAvoidpost-processing time

Core Design Contradiction:

Manufacturing precisionVSLoss of time

Solution Approach 1:

The patent eliminates post-processing time by performing the correction action preliminarily in the digital domain. The correction profile is applied to the CAD data before manufacturing begins, so that the polishing pad is fabricated with corrected geometry directly, avoiding any subsequent machining or adjustment operations.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The patent replaces mechanical post-processing operations with computational correction. Instead of using physical machining tools to remove or add material after fabrication, the system uses software-based geometric correction in the digital model, substituting mechanical intervention with information processing.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

3Device complexity

If additive manufacturing is used to fabricate polishing pads, then device complexity and post-processing requirements are reduced, but manufacturing precision deteriorates due to process-induced distortions

Engineering Contradiction:

Improvemanufacturing process simplicityVSAvoidprofile accuracy

Core Design Contradiction:

Device complexityVSManufacturing precision

Solution Approach 1:

The patent maintains the simplicity of additive manufacturing while improving precision by applying preliminary digital correction. The correction profile is integrated into the manufacturing data before the process begins, allowing the simple one-step fabrication approach to produce geometrically accurate parts without requiring complex post-processing equipment or procedures.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The patent resolves the precision issue by changing the digital parameters of the design model. The correction profile modifies the input geometry parameters to account for process-induced distortions, allowing the additive manufacturing process to produce accurate parts through parameter optimization rather than through complex process control.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for more precise control of the polishing pad geometry, enhancing polishing efficacy, reducing post-processing needs, and increasing yield and throughput by compensating for distortions during the manufacturing process rather than after the article is formed.

Implementation Method 1

a plurality of layers of the feed material are dispensed by droplet ejection in accordance to the modified pattern

Methodology Applied

Scientific EffectDroplet ejection:

Data Source

PatentUS11597054B2Correction of fabricated shapes in additive manufacturing

Publication Date: 2023.03.07 APPLIED MATERIALS INC

AI summary

A method of fabricating an object using an additive manufacturing system includes receiving data indicative of a desired shape of the object to be fabricated by droplet ejection. The desired shape defines a profile including a top surface and one or more recesses. Data indicative of a pattern of dispensing feed material is generated to at least partially compensate for distortions of the profile caused by the additive manufacturing system, and a plurality of layers of the feed material are dispensed by droplet ejection in accordance to the pattern.