Polishing Pad Conditioner Brazing Composition
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Solution Overview
Problem
Conventional polishing pad conditioners experience thermal deformation and abrasive grain detachment due to high brazing temperatures, leading to unstable bonding and reduced polishing performance.
Innovation Solution
A polishing pad conditioner is fabricated using a brazing metal composition with 70%≦Ni+Fe≦90%, 1%≦Cr≦25%, 2%≦Si+B≦15%, and 0.1%≦P≦8%, which stabilizes the melting point and minimizes thermal deformation, ensuring uniform abrasive grain bonding.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If the brazing temperature is raised to improve bonding performance of abrasive grains, then the bonding strength is improved, but the metal support undergoes heavy thermal deformation
Solution Approach 1:
The invention changes the chemical composition parameters of the brazing metal by adding boron (0.01-5 mass%) to the Ni-Fe-Cr-Si alloy system. This compositional parameter change lowers the melting point of the brazing metal, enabling effective brazing at reduced temperatures that prevent thermal deformation of the metal support while maintaining adequate bonding strength of abrasive grains.
2Reliability
If the brazing temperature is raised to ensure complete melting of brazing metal, then the bonding reliability is improved, but the thermal deformation of metal support increases
Solution Approach 1:
The invention modifies the melting point parameter of the brazing metal through boron addition, which acts as a melting point depressant. This allows the brazing process to be conducted at lower temperatures while ensuring complete melting and reliable bonding of abrasive grains to the metal support.
3Ease of manufacture
If conventional brazing metal composition is used, then the manufacturing process is simple, but the melting point is unstable and bonding condition varies
Solution Approach 1:
The invention introduces boron as a controlling parameter in the brazing metal composition. This parameter change stabilizes the melting point of the brazing metal, ensuring consistent bonding conditions for abrasive grains while maintaining the simplicity of the manufacturing process through a straightforward alloying approach.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents abrasive grain detachment and maintains stable bonding performance, enhancing the flatness and longevity of the polishing pad conditioner.
Implementation Method 1
the brazing metal does not melt at its original melting point or that the brazing fails
Implementation Method 2
It is fabricated by bonding abrasive grains to a metal substrate by electrodeposition, brazing or the like
Implementation Method 3
brazing generally enables strong bonding of the abrasive grains because the brazing metal can be melted by increasing its temperature so as to make some elements of the abrasive grains chemically bond with some elements of the brazing metal
Implementation Method 4
this leads to a problem of heavy thermal deformation of the metal support owing to the high brazing temperature
Data Source
AI summary
The invention provides a polishing pad conditioner that enables stabilization of brazing metal melting point, minimization of abrasive grain detachment by uniformizing and stabilizing abrasive grain brazing condition, and enhancement of flatness by minimizing thermal deformation of the metal support. The polishing pad conditioner is fabricated by brazing multiple abrasive grains to the surface of a metal support with brazing metal, wherein the composition of the brazing metal expressed in mass % is such that 70%≦Ni+Fe≦90% (provided that 0≦Fe/(Ni+Fe)≦0.4), 1%≦Cr≦25%, 2%≦Si+B≦15% (provided that 0≦B/(Si+B)≦0.8), and 0.1%≦P≦8%.


