3D Printed Polishing Pad with Embedded Abrasive Particles

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Solution Overview

Problem

Conventional polishing pads with embedded abrasive particles face challenges in uniform distribution, leading to agglomeration and defects during the polishing process, limiting the use of materials like alumina due to difficulties in suspending them in polymer matrices.

Innovation Solution

A 3D printing process is employed to successively deposit layers of polymer matrix with abrasive particles, ensuring a desired distribution and preventing agglomeration by continuous agitation and localized dispensing, allowing for the use of alumina and other abrasive materials.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If alumina abrasive particles are embedded in polishing pads, then polishing performance is improved, but uniform distribution is difficult to achieve leading to agglomeration

Engineering Contradiction:
Improvepolishing performanceVSAvoiduniform distribution
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The polishing pad is divided into multiple layers with different particle concentrations. The first layer contains a first concentration of alumina particles, while the second layer contains a second concentration of alumina particles, creating a segmented structure that prevents agglomeration while maintaining polishing performance.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the polishing pad have different particle concentrations tailored to specific needs. The first layer has higher particle concentration for aggressive material removal, while the second layer has lower concentration for uniform distribution and preventing agglomeration, creating local quality variations throughout the pad structure.

Inventive Principle:
Principle #3Local quality

2Ease of manufacture

If conventional molding or casting methods are used to make polishing pads, then manufacturing is simplified, but particle distribution becomes non-uniform causing defects

Engineering Contradiction:
Improvemanufacturing processVSAvoidparticle distribution uniformity
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The manufacturing process is segmented into multiple steps: first forming a base layer with initial particle distribution, then adding additional layers with controlled particle concentrations. This segmented approach allows precise control over final particle distribution while maintaining manufacturing feasibility.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Particles are pre-distributed in controlled concentrations within each layer before the layers are combined. This preliminary action of distributing particles in separate layers with specific concentrations prevents the agglomeration problems that occur when particles are added all at once in conventional methods.

Inventive Principle:
Principle #10Preliminary action

3Quantity of substance

If abrasive particles are suspended in polymer solutions, then embedding is achieved, but suspension uniformity is poor leading to agglomeration

Engineering Contradiction:
Improveabrasive particle embeddingVSAvoidsuspension uniformity
Core Design Contradiction:
Quantity of substanceVSManufacturing precision

Solution Approach 1:

The suspension process is segmented into multiple stages where particles are added and distributed in separate layers rather than all at once. Each layer achieves better local uniformity, and the combination of layers produces overall uniform distribution without agglomeration.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The particle concentration parameter is changed between layers - the first layer uses one concentration while the second layer uses a different concentration. This parameter change allows optimization of suspension uniformity in each layer while achieving the desired overall particle embedding in the final product.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method achieves improved polishing uniformity and prevents agglomeration, enabling the commercialization of polishing pads with alumina particles by ensuring uniform distribution and embedding abrasive particles within the polishing layer.

Implementation Method 1

A 3D printing process is employed to successively deposit layers of polymer matrix with abrasive particles

Methodology Applied
Scientific Effect3D Printing: 3D Printing

Implementation Method 2

solidifying the polymer matrix precursor to form a solidified polymer matrix having the particles embedded in the desired distribution

Methodology Applied
Scientific EffectPhase Change: Phase Change

Data Source

PatentUS11794308B2Printed chemical mechanical polishing pad having particles therein
Publication Date: 2023.10.24 APPLIED MATERIALS INC
  • US11794308B2 patent drawing
  • US11794308B2 patent drawing

AI summary

A method of fabricating a polishing layer of a polishing pad includes determining a desired distribution of particles to be embedded within a polymer matrix of the polishing layer. A plurality of layers of the polymer matrix is successively deposited with a 3D printer, each layer of the plurality of layers of polymer matrix being deposited by ejecting a polymer matrix precursor from a nozzle. A plurality of layers of the particles is successively deposited according to the desired distribution with the 3D printer. The polymer matrix precursor is solidified into a polymer matrix having the particles embedded in the desired distribution.