Polishing Pad Formulation with Polyester Dispersant

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Solution Overview

Problem

Existing polishing pad formulations face challenges with inadequate dispersion and low loading of abrasive nanoparticles, requiring excessive time for sonication, which hinders commercial-scale production efficiency.

Innovation Solution

A formulation for 3D printing of polishing pads incorporating a polyester derivative dispersant and metal-oxide nanoparticles, where sonication is used to disperse nanoparticles within the monomer, achieving increased loading and thermal stability while reducing processing time.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Quantity of substance

If conventional molding or casting methods are used to manufacture polishing pads, then production can be performed commercially, but nanoparticle dispersion is inadequate and loading is low

Engineering Contradiction:
Improvenanoparticle loadingVSAvoidnanoparticle dispersion
Core Design Contradiction:
Quantity of substanceVSStability of the object's composition

Solution Approach 1:

The patent changes the chemical parameters of the formulation by introducing a polyester derivative dispersant with specific functional groups that chemically interact with nanoparticles. This chemical parameter change enables high nanoparticle loading (up to 80 wt%) while maintaining stable dispersion, resolving the contradiction between quantity and stability.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent creates a composite formulation system combining monomer, polyester derivative dispersant, and metal oxide nanoparticles. This composite approach allows the dispersant to mediate between the monomer and nanoparticles, achieving both high loading and stable dispersion that neither component could achieve alone.

Inventive Principle:
Principle #40Composite materials

2Stability of the object's composition

If sonication is used to disperse nanoparticles in conventional formulations, then some dispersion is achieved, but processing time is excessive

Engineering Contradiction:
Improvenanoparticle dispersionVSAvoidsonication time
Core Design Contradiction:
Stability of the object's compositionVSLoss of time

Solution Approach 1:

The polyester derivative dispersant acts as an intermediary substance between nanoparticles and monomer. It adsorbs onto nanoparticle surfaces and provides steric and electrostatic stabilization, enabling rapid dispersion with minimal sonication time. The dispersant mediates the interaction, preventing aggregation and reducing processing time significantly.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent changes the rheological and surface chemical parameters of the formulation by adding the polyester derivative dispersant. This parameter change reduces the energy barrier for nanoparticle separation and stabilization, allowing efficient dispersion to be achieved in much shorter sonication times compared to conventional formulations.

Inventive Principle:
Principle #35Parameter changes

3Quantity of substance

If high nanoparticle loading is achieved, then polishing performance is improved, but formulation stability and thermal stability become compromised

Engineering Contradiction:
Improvenanoparticle loadingVSAvoidformulation thermal stability
Core Design Contradiction:
Quantity of substanceVSReliability

Solution Approach 1:

The polyester derivative dispersant serves as a thermal stability intermediary by forming a protective layer around nanoparticles. This layer prevents direct nanoparticle-nanoparticle interactions that lead to aggregation during thermal processing, maintaining formulation stability even at high loadings (up to 80 wt%). The dispersant absorbs thermal stress and prevents catastrophic failure.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent develops a composite formulation where the polyester derivative dispersant and monomer create a matrix that stabilizes high concentrations of metal oxide nanoparticles. This composite structure provides thermal stability through the synergistic interaction of components, allowing high nanoparticle loading without compromising reliability.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables efficient dispersion of nanoparticles, achieving high loading rates and thermal stability, thereby enhancing the performance and manufacturing efficiency of polishing pads for chemical mechanical polishing processes.

Implementation Method 1

subjecting the monomer having the nanoparticles and dispersant to sonication to disperse the nanoparticles in the monomer

Methodology Applied
Scientific EffectSonication: Ultrasonic Vibration

Implementation Method 2

efficient dispersion of nanoparticles, achieving high loading rates and thermal stability

Methodology Applied
Scientific EffectDispersion: Dispersion (of waves)

Implementation Method 3

polymerizing the monomer as ejected to form the polishing layer, wherein the polishing layer includes the nanoparticles

Methodology Applied
Scientific EffectPolymerization: Photopolymerisation

Data Source

PatentUS11965103B2Additive manufacturing of polishing pads
Publication Date: 2024.04.23 APPLIED MATERIALS INC
  • US11965103B2 patent drawing
  • US11965103B2 patent drawing
  • US11965103B2 patent drawing

AI summary

A formulation, system, and method for additive manufacturing of a polishing pad. The formulation includes monomer, dispersant, and nanoparticles. A method of preparing the formulation includes adding a dispersant that is a polyester derivative to monomer, adding metal-oxide nanoparticles to the monomer, and subjecting the monomer having the nanoparticles and dispersant to sonication to disperse the nanoparticles in the monomer.