Calibration Apparatus for Substrate Polishing Pressure and Load Control
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Solution Overview
Problem
The relationship between pressure command values and actual pressure, as well as load command values and actual load, in substrate polishing apparatuses is not consistently calibrated, leading to inefficiencies and increased operator workload during calibration processes.
Innovation Solution
A method and apparatus for calibrating the relationship between pressure command values, air-bag pressure, and pressure read values, and load command values, load on the dresser, and load read values, using a pressure control unit and load control unit, respectively, by sequentially inputting command values and determining parameters to establish accurate relationships between these values.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If calibration is performed manually by operators to ensure accurate pressure and load control, then measurement precision is improved, but loss of time and productivity deteriorate due to extra operator workload
Solution Approach 1:
The calibration apparatus enables the substrate polishing apparatus to perform self-calibration automatically. The system inputs a plurality of command values, acquires corresponding measurement values from sensors, and determines conversion parameters without requiring manual operator intervention, thus reducing calibration time while maintaining accuracy
Solution Approach 2:
The calibration process is performed in advance during apparatus activation or when expendable supplies are replaced. By automating the calibration sequence with pre-programmed command values and automatic data acquisition, the system prepares accurate conversion parameters before normal operation begins, eliminating the need for time-consuming manual calibration
2Productivity
If automated calibration is implemented to reduce operator workload, then productivity is improved, but device complexity increases due to additional calibration apparatus components
Solution Approach 1:
The calibration apparatus is designed to be versatile and can calibrate multiple sensors (pressure sensors and load sensors) using the same basic architecture. The system accepts command values, acquires measurement values from different sensor types, and determines conversion parameters through a unified process, reducing overall system complexity while maintaining high productivity
Solution Approach 2:
The calibration apparatus serves as an intermediary device that bridges the command value input and sensor measurement acquisition. It includes a command value input unit, measurement value acquiring unit, and parameter determining unit that work together to automate the calibration process without requiring complex integration with the main polishing apparatus control systems
3Measurement precision
If manual calibration procedures are used to verify pressure and load relationships, then measurement precision is maintained, but ease of operation deteriorates due to complex calibration tasks
Solution Approach 1:
The calibration apparatus implements automatic feedback by acquiring measurement values from sensors in response to input command values and using this feedback to determine accurate conversion parameters. The system automatically processes the relationship between command values and measurement values, eliminating the need for operators to manually verify pressure-load relationships while maintaining high measurement precision
Data Source
AI summary
According to one embodiment of the present disclosure, provided is a method of calibrating a relationship among a pressure command value, a pressure in an air-bag, and a pressure read value of the air-bag in a substrate polishing apparatus, the substrate polishing apparatus including: a polishing table; the air-bag configured to press a substrate against the polishing table, the pressure for pressing the substrate being variable; and a pressure control unit configured to control the pressure in the air-bag in accordance with the pressure command value inputted to the pressure control unit, and read the pressure in the air-bag.