Polishing Portion Support Structure for Tilt Stability and Vibration Control
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Solution Overview
Problem
Polishing portions in substrate polishing apparatuses experience vibration due to the rotation of the polishing head, affecting substrate quality and making it difficult to maintain the tilt of the polishing portion, which is not fixed by a fixing structure.
Innovation Solution
A support apparatus is provided with a support portion, fastening portion, and tilt adjustment portion to securely fasten and adjust the tilt of the polishing portion, using protrusions, insertion holes, tilt adjustment shafts, and catch fringes to reduce vibration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If the polishing portion is placed on the support portion without a fixing structure, then the device complexity is reduced, but the stability of the polishing portion and its tilt cannot be maintained
Solution Approach 1:
The fixing structure is segmented into multiple functional components: protrusions on the support portion, corresponding insertion holes in the polishing portion, tilt adjustment shafts, and fixing portions. This segmentation allows each component to perform its specific function while collectively achieving both fixation and tilt adjustment capabilities.
Solution Approach 2:
The tilt adjustment mechanism allows the polishing portion's tilt angle to be dynamically adjusted and fixed at different positions. The tilt adjustment shafts can rotate to change the tilt angle, and the fixing portions can lock the shafts at desired positions, providing both flexibility and stability.
2Ease of operation
If the polishing portion is not fixed by a fixing structure, then the ease of operation is improved, but vibration of the polishing head cannot be reduced
Solution Approach 1:
The vibration reduction is achieved through segmented fastening points (multiple protrusions and insertion holes) that distribute and stabilize the polishing portion, reducing unwanted vibrations while maintaining ease of installation through the modular design.
Solution Approach 2:
The tilt adjustment shafts and fixing portions act as intermediary elements between the support portion and the polishing portion, providing both mechanical connection and vibration damping through their structural design and interaction.
3Stability of the object's composition
If a fixing structure is introduced to maintain tilt, then the stability of the polishing portion is improved, but the device complexity increases
Solution Approach 1:
The fixing and tilt adjustment functions are merged into a single integrated structure. The protrusions and insertion holes provide fixation, while the tilt adjustment shafts and fixing portions simultaneously enable tilt adjustment and locking, achieving multiple functions without adding separate complex mechanisms.
4Reliability
If the polishing portion is securely fastened, then the reliability of the polishing process is improved, but the ease of repair is reduced
Solution Approach 1:
The modular segmented design with discrete protrusions, insertion holes, and adjustable shafts allows the polishing portion to be easily detached and replaced while maintaining secure fastening during operation, balancing reliability with ease of repair.
Data Source
AI summary
A support apparatus including a support portion configured to support a polishing portion for polishing a substrate; a fastening portion configured to fasten the polishing portion and the support portion; and a tilt adjustment portion configured to adjust a tilt of the polishing portion, the fastening portion including a fastening body attached to a side surface of the polishing portion; protrusions protruding outwardly from the fastening body, and the protrusions defining internal spaces therein; the support portion surrounding the side surface of the polishing portion, and defining insertion holes on the inner surface of the support portion, configured to respectively receive the protrusions ; the tilt adjustment portion including tilt adjustment shafts penetrating the support portion to pass through respective ones of the internal spaces and respective ones of the insertion holes.