Polishing Tool With Deformable Elastomer Sheet
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Solution Overview
Problem
Existing methods for polishing large-size synthetic quartz glass substrates face challenges in achieving precise control over surface accuracy and efficiency, particularly in selectively removing raised portions without the need for tool exchange, leading to increased working time and potential over-polishing of surrounding areas.
Innovation Solution
A method utilizing a working tool with a rotatably mounted polishing plate, an expandable elastomer sheet, and an abrasive cloth, where the elastomer sheet is deformed to an inverted convex shape by applying different pressures at various positions, allowing for precise polishing without tool exchange, enabling selective removal of raised portions and adjustment of substrate thickness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the contact area between the working face of the working tool and the substrate is small, then selective polishing of raised portions is effective, but the overall thickness adjustment requires longer work time
Solution Approach 1:
The patent applies a flexible elastomer sheet that can dynamically change its contact area with the substrate by varying the pressing force. When pressing force is increased, the elastomer sheet deforms to increase contact area for faster thickness adjustment. When pressing force is decreased, the contact area reduces for selective polishing of raised portions. This dynamic adjustment resolves the contradiction between precision and productivity.
Solution Approach 2:
The patent changes the physical parameter of the elastomer sheet (its deformation state) by adjusting the pressing force applied to it. This parameter change allows the same tool to achieve different contact areas, enabling both selective polishing and efficient thickness adjustment without tool exchange, thus resolving the contradiction between manufacturing precision and productivity.
2Productivity
If the contact area between the working face of the working tool and the substrate is large, then the overall thickness adjustment time becomes shorter, but surrounding portions are widely polished making precise control of surface accuracy difficult
Solution Approach 1:
The flexible elastomer sheet dynamically adjusts its contact area based on the applied pressing force. High pressing force causes the elastomer to deform and increase contact area for rapid thickness adjustment. Low pressing force reduces contact area to only the raised portions for precise polishing. This dynamic behavior resolves the contradiction between productivity and precision.
Solution Approach 2:
The patent uses a flexible elastomer sheet as the working face of the tool. This flexible film conformally contacts the substrate surface and its contact area can be controlled by deformation through pressing force adjustment, enabling both large-area thickness adjustment and selective polishing without tool exchange.
3Manufacturing precision
If the method includes selecting one tool from a plurality of tools having different working areas, then polishing precision can be controlled, but the exchange of tools during the process is cumbersome adding to the working time
Solution Approach 1:
The patent creates a universal polishing tool with a flexible elastomer sheet that can perform multiple functions: selective polishing of raised portions and overall thickness adjustment. By controlling the pressing force, the same tool adapts its contact area to suit different polishing requirements, eliminating the need for multiple specialized tools and their exchange, thus resolving the contradiction between precision and time loss.
Solution Approach 2:
The elastomer sheet's ability to dynamically change its contact area through pressing force adjustment allows a single tool to replace multiple tools with different fixed working areas. This dynamic adaptability eliminates tool exchange time while maintaining polishing precision through controlled contact area.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for efficient and precise polishing of large-size synthetic quartz glass substrates, reducing working time and increasing productivity by eliminating the need for tool exchange, while maintaining high surface accuracy and flatness.
Implementation Method 1
deforming the surface of the abrasive cloth to be inverted convexly in accordance with differences of pressing force applied to the elastomer sheet at a plurality of positions
Implementation Method 2
an abrasive cloth attached to a lower surface of the elastomer sheet, bringing the inverted convexly deformed surface of the abrasive cloth in contact with a substrate, and rotating and moving the working tool for polishing the substrate
Data Source
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AI summary
There is furnished a working tool comprising a rotating shaft (6), a polishing plate (3) mounted on the shaft, an expandable elastomer sheet (4) attached to the polishing plate (3), an abrasive cloth (5) attached to the elastomer sheet (4), and means for pressing the elastomer sheet (4) at a plurality of positions under respective predetermined different pressures such that a lower surface of the abrasive cloth (5) is deformed to the desired inverted convex shape in accordance with differences of pressing force applied to the elastomer sheet (4) at the plurality of positions. A substrate is produced by bringing the inverted convexly deformed surface of the abrasive cloth (5) in contact with a substrate stock, and rotating and moving the working tool for polishing the substrate over a selected area.