Polyamide Coated Filter Membrane for Acidic Liquid Purity
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Solution Overview
Problem
Nylon filter membranes used in microelectronic device processing are ineffective or sub-optimal due to metal ion extraction from acidic liquids and limited solvent compatibility, leading to contamination and reduced purity of filtered liquids.
Innovation Solution
A coated filter membrane with a porous polymeric layer and a crosslinked polyamide film coating, using a solvent like propanol for polyamide coating that is non-acidic and non-ionic, avoiding the use of formic acid and calcium chloride, which enhances filtration performance and stability in acidic environments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If nylon filter membranes are used for filtering acidic liquids in microelectronic device processing, then filtration function is provided, but metal ions are extracted from the nylon into the acidic liquid causing contamination
Solution Approach 1:
The patent removes the problematic metal catalyst (magnesium) from the filter membrane structure by using a metal-catalyst-free polymerization method to create the polyamide coating. This eliminates the source of metal ion extraction that contaminates acidic liquids during filtration.
Solution Approach 2:
The patent changes the chemical composition parameters of the filter membrane by using specific polyamide polymers with controlled metal content (less than 10 ppm, preferably less than 1 ppm) and adjusting the coating formulation to exclude metal catalysts, thereby preventing metal ion extraction into acidic liquids.
2Ease of manufacture
If traditional solvents like formic acid or calcium chloride are used for polyamide coating, then coating is achieved, but solvent residues contaminate the filtered liquid and reduce purity
Solution Approach 1:
The patent removes harmful solvent residues by replacing traditional solvents (formic acid, calcium chloride) with alternative solvents that do not leave contaminating residues, thereby maintaining liquid purity in microelectronic device processing applications.
Solution Approach 2:
The patent changes the solvent system parameters by using solvents with appropriate boiling points and volatility characteristics that allow complete evaporation without residue, or solvents that are compatible with the filtration application and do not contaminate the filtered liquid.
3Stability of the object's composition
If nylon filter membranes are used to provide inertness and solvent resistance, then durability is improved, but solvent compatibility is limited reducing preparation options
Solution Approach 1:
The patent changes the chemical parameter of the filter membrane by using polyamide polymers with specific functional groups and chemical structures that provide both chemical stability and broad solvent compatibility, allowing the membrane to withstand various solvents used in microelectronic device processing without degradation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The coated filter membrane effectively removes contaminants and impurities from acidic liquids, maintaining high purity and reducing metal ion extraction, thereby improving the reliability of microelectronic device processing.
Implementation Method 1
a porous polymeric filter layer that is coated with a layer that contains cross-linked polyamide polymer... to filter a fluid such as a liquid chemical to remove unwanted material from the fluid
Implementation Method 2
Exposing that type of nylon of a filter membrane to an acidic liquid can tend to cause the metal (e.g., magnesium) to be extracted from the nylon into the acidic fluid that is being filtered... maintaining high purity and reducing metal ion extraction
Implementation Method 3
coated with a layer that contains cross-linked polyamide polymer... crosslinking the polyamide
Data Source
AI summary
Described are filter membranes coated with a polyamide, filters and filter cartridges that include the filter membranes, and methods of using and making the filter membranes.