Polydopamine Coated Containers for Semiconductor Chemical Purity
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Solution Overview
Problem
Containers used in the semiconductor manufacturing industry and other fields can introduce metal impurities into process chemicals during storage and transportation, which can lead to patterning defects and alter electrical properties of devices, and existing solutions like fluorinated liners are not environmentally friendly and passive in removing impurities.
Innovation Solution
A container with a polydopamine coating on its inner surface, formed through a solution-based method using dopamine hydrochloride, a buffer, and a solvent, which actively removes metal impurities and prevents leaching from the container material.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If fluorinated liners are used to reduce particle generation, then particle generation is reduced, but environmental friendliness deteriorates and active impurity removal is not achieved
Solution Approach 1:
The patent changes the chemical composition parameters of the container liner by using polydopamine coating instead of fluorinated materials. This parameter change maintains particle generation reduction while eliminating environmental harm associated with fluorinated compounds.
Solution Approach 2:
The patent converts the passive protective function into an active beneficial function. The polydopamine coating not only prevents particle generation but also actively removes metal impurities through chelation, transforming a simple protective barrier into an active purification system.
2Object-affected harmful factors
If fluorinated liners are used to reduce particle generation, then particle generation is reduced, but active impurity removal capability is lost
Solution Approach 1:
The patent converts the passive protective function into an active beneficial function. The polydopamine coating not only prevents particle generation but also actively removes metal impurities through chelation, transforming a simple protective barrier into an active purification system.
Solution Approach 2:
The polydopamine coating performs multiple functions simultaneously: it acts as a protective barrier against particle generation, an active agent for metal impurity removal through chelation, and provides corrosion resistance. This multi-functionality resolves the contradiction by integrating both particle reduction and active impurity removal in a single solution.
3Ease of operation
If conventional containers are used for storage and transportation, then ease of operation is maintained, but metal impurity introduction occurs
Solution Approach 1:
The patent applies local quality modification by coating only the inner surface of the container with polydopamine. This localized treatment provides impurity removal capability at the critical interface where chemicals contact the container, while maintaining the overall container structure and ease of operation.
Solution Approach 2:
The patent creates a composite structure by combining the conventional container material with a polydopamine coating layer. This composite material provides both the mechanical properties of the original container for ease of operation and the chemical properties of polydopamine for active impurity removal.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The polydopamine coating effectively reduces metal impurities in stored chemicals by over 90% and prevents metal leaching, enhancing the purity and reliability of semiconductor materials and applicable in various industries including electronics, water, and pharmaceuticals.
Implementation Method 1
The polydopamine coating effectively reduces metal impurities in stored chemicals by over 90%
Implementation Method 2
prevents metal leaching
Data Source
AI summary
Disclosed herein is a container comprising an enclosure having an outer surface and an inner surface; and a polydopamine coating that is optionally derivatized disposed on an inner surface of the enclosure. Disclosed herein too is a method of coating a container, comprising (a) providing a container comprising an enclosure having an outer surface and an inner surface; and (b) disposing a solution comprising dopamine hydrochloride, a buffer and a solvent in the container.