Polygonal Linear Accelerator Layout for Compact Ion Implantation

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Solution Overview

Problem

Existing linear accelerators for ion implantation systems face challenges with large size, beamline length, and the need for improved serviceability while maintaining functionality.

Innovation Solution

A linear accelerator design featuring a polygonal backbone, such as a hexagonal backbone, with components arranged along different sides of the beamline enclosure, allowing for compact and accessible placement of resonators, bunchers, and quadrupole assemblies, facilitating efficient space usage and maintenance access.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Use of energy by moving object

If a traditional linear accelerator design is used, then the ion beam can be accelerated to high energy, but the device occupies a large space and requires a long beamline length

Engineering Contradiction:
Improveion beam energyVSAvoiddevice footprint
Core Design Contradiction:
Use of energy by moving objectVSArea of stationary object

Solution Approach 1:

The patent applies dimensionality change by transitioning from a traditional linear arrangement of acceleration stages to a polygonal (e.g., hexagonal) configuration where stages are distributed around a central axis. This allows the beamline to fold back on itself, effectively utilizing three-dimensional space rather than extending linearly, thereby reducing the overall device footprint while maintaining the required acceleration path length.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent implements nesting by placing resonators, bunchers, and quadrupole assemblies within or adjacent to the polygonal beamline structure. Components are arranged in a compact, nested configuration where inner components are positioned within the geometric structure formed by outer components, maximizing space utilization and reducing the external dimensions of the accelerator.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Reliability

If multiple components are arranged in a traditional linear configuration, then the acceleration function is maintained, but serviceability and maintenance access become difficult

Engineering Contradiction:
Improveacceleration functionVSAvoidcomponent serviceability
Core Design Contradiction:
ReliabilityVSEase of repair

Solution Approach 1:

The patent applies segmentation by dividing the accelerator into modular acceleration stages arranged around the polygonal backbone. Each stage with its resonator, buncher, and quadrupole assembly can be independently accessed, removed, or serviced. This modular segmentation allows maintenance personnel to work on individual components without disrupting the entire system, significantly improving serviceability while maintaining the complete acceleration function.

Inventive Principle:
Principle #1Segmentation

3Device complexity

If components are placed along a single side of the beamline, then the design is simple, but space utilization is inefficient and access is limited

Engineering Contradiction:
Improvedesign simplicityVSAvoidspace utilization
Core Design Contradiction:
Device complexityVSArea of stationary object

Solution Approach 1:

The patent employs asymmetry by distributing components unevenly around the polygonal backbone rather than symmetrically or linearly. Different sides of the polygon can accommodate different types of components based on their specific requirements, allowing optimized placement for both space utilization and maintenance access. This asymmetric arrangement maximizes the use of available three-dimensional space while maintaining design feasibility.

Inventive Principle:
Principle #4Asymmetry

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design achieves a more compact and efficient linear accelerator architecture that maintains performance, providing enhanced serviceability and space utilization without sacrificing functionality.

Implementation Method 1

a resonator, coupled to deliver an RF signal to the drift tube assembly

Methodology Applied
Scientific EffectRF signal delivery: Electromagnetic Induction

Implementation Method 2

a quadrupole assembly to shape the ion beam

Methodology Applied
Scientific EffectQuadrupole lens focusing: Electromagnetic Induction

Implementation Method 3

a drift tube assembly to conduct an ion beam therethrough

Methodology Applied
Scientific EffectIon acceleration: Electric Field

Data Source

PatentUS20250318041A1Ion implanter and linear accelerator having polygonal backbone
Publication Date: 2025.10.09 APPLIED MATERIALS INC
  • US20250318041A1 patent drawing
  • US20250318041A1 patent drawing
  • US20250318041A1 patent drawing

AI summary

A linear accelerator apparatus may include a beamline enclosure that defines a polygonal backbone, and a plurality of acceleration stages, disposed along a length of the beamline enclosure. A given acceleration stage may include a drift tube assembly to conduct an ion beam therethrough, a resonator, coupled to deliver an RF signal to the drift tube assembly, and a quadrupole assembly to shape the ion beam. As such, at a first acceleration stage, a first resonator may be disposed along a first side of the polygonal backbone, and at a second acceleration stage, adjacent to and downstream of the first acceleration stage, a second resonator may be disposed along a second side of the polygonal backbone, different from the first side.