Polygonal Closed-Loop Waveguides for Optical Loss Matching

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Solution Overview

Problem

Optical signal loss and inefficiencies in ring-shaped waveguide structures of semiconductor photonics devices due to uncontrolled external coupling loss and intrinsic loss, leading to under-coupling or over-coupling issues that affect the Q factor and power coupling coefficient, resulting in inefficient modulation and filtering.

Innovation Solution

Manufacturing closed-loop optical waveguides with a polygonal top view shape and controlled segment-induced loss by adjusting the radius, quantity, width, and angle of segments to achieve critical coupling, balancing the Q factor and power coupling coefficient.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If ring-shaped waveguide structures are used for optical signal transmission, then optical confinement and propagation efficiency are improved, but external coupling loss and intrinsic loss cause under-coupling or over-coupling issues that reduce the Q factor and power coupling coefficient

Engineering Contradiction:
Improveoptical signal transmission efficiencyVSAvoidexternal coupling loss and intrinsic loss
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The ring-shaped waveguide is divided into multiple straight segments arranged in a closed-loop polygonal configuration. This segmentation approach maintains the optical confinement benefits of ring structures while reducing curvature-induced intrinsic losses. The waveguide consists of multiple straight sections connected at vertices, eliminating continuous curvature and associated propagation losses.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent optimizes several geometric parameters of the polygonal waveguide structure including the number of segments, segment length, vertex angle, and overall loop dimensions. By carefully adjusting these parameters, the design achieves critical coupling conditions that balance external coupling loss and intrinsic loss, optimizing both Q factor and power coupling coefficient simultaneously.

Inventive Principle:
Principle #35Parameter changes

2Loss of energy

If the waveguide structure is modified to reduce loss, then optical signal efficiency is improved, but manufacturing complexity increases due to precise control requirements of segment geometry and arrangement

Engineering Contradiction:
Improveoptical signal lossVSAvoidwaveguide structure complexity
Core Design Contradiction:
Loss of energyVSDevice complexity

Solution Approach 1:

The waveguide is structured as multiple straight segments that can be fabricated using standard photolithography and etching processes. Each segment is a simple straight waveguide section, and the overall complex loop structure is achieved by arranging these simple segments at specific angles and positions, making the design compatible with existing manufacturing capabilities.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent provides specific guidance on optimizing geometric parameters (number of segments, segment length, vertex angles) to achieve desired optical performance. This parameter-based design approach allows manufacturers to tune the structure for critical coupling conditions while using conventional fabrication processes, balancing performance requirements with manufacturing feasibility.

Inventive Principle:
Principle #35Parameter changes

3Reliability

If closed-loop polygonal waveguides are manufactured with controlled segment-induced loss, then critical coupling is achieved improving Q factor and power transfer efficiency, but manufacturing precision requirements increase for controlling segment geometry

Engineering Contradiction:
ImproveQ factor and power coupling coefficientVSAvoidsegment geometry control precision
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The polygonal waveguide structure uses straight segments with discrete vertices, which are more tolerant to manufacturing variations compared to continuous curved structures. Each segment can be independently defined by simple geometric parameters (length, orientation), and small deviations in fabrication do not propagate as severely as they would in continuously curved waveguides.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent identifies and optimizes key geometric parameters (segment count, segment length, vertex angles) that have the greatest impact on optical performance. By focusing precision requirements on these critical parameters rather than all dimensions, the design achieves critical coupling conditions with realistic manufacturing tolerances. The optimization provides target values and acceptable ranges for each parameter.

Inventive Principle:
Principle #35Parameter changes

Data Source

PatentUS20250224566A1Semiconductor photonics device and methods of formation
Publication Date: 2025.07.10 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20250224566A1 patent drawing
  • US20250224566A1 patent drawing
  • US20250224566A1 patent drawing

AI summary

A semiconductor photonics device includes a plurality of bus optical waveguide structures and one or more closed-loop optical waveguide structures that are arranged in a cascaded photonic integrated circuit such as a cascaded resonator circuit. At least one of the closed-loop optical waveguide structures is manufactured to have a polygonal top view shape in which the closed-loop optical waveguide structure includes a plurality of segments. This enables the intrinsic loss for the closed-loop optical waveguide structure to be tuned to achieve optical loss matching in the photonic integrated circuit.