Polyhedral Conversion Pipe for Low-Particle Exhaust Flow

Solution Overview

Problem

Gas flow stagnation and by-product accumulation in exhaust pipes of semiconductor manufacturing processes lead to particle generation, which can degrade the quality of semiconductor devices.

Innovation Solution

A conversion pipe arrangement with a first connector having a rectangular opening, a second connector with an octagonal opening, and a polyhedral pipe connecting them, facilitating fluid communication while reducing gas flow stagnation and by-product accumulation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional pipe arrangements with simple geometric shapes (e.g., rectangular or circular cross-sections) are used in exhaust pipes, then manufacturing is easier and device complexity is reduced, but gas flow stagnation occurs and by-products accumulate leading to particle generation

Engineering Contradiction:

Improvegas flow efficiencyVSAvoidpipe structure complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The exhaust pipe employs a curved cross-sectional shape (e.g., oval or rounded rectangular) instead of sharp angular shapes. This curvature eliminates dead zones where gas flow stagnation would occur, preventing by-product accumulation and particle generation while maintaining manufacturing feasibility.

Inventive Principle:

Principle #14Spheroidality (Curvature)

Solution Approach 2:

The pipe cross-sectional shape parameters are optimized to balance flow dynamics and manufacturing. Specific curvature radii and aspect ratios are selected to ensure smooth gas flow transition and eliminate stagnation zones, while keeping the geometry simple enough for standard fabrication processes.

Inventive Principle:

Principle #35Parameter changes

2Reliability

If pipe arrangements with smooth curved surfaces are used to prevent gas flow stagnation, then particle generation is reduced, but manufacturing difficulty increases and production cost rises

Engineering Contradiction:

Improveparticle contamination controlVSAvoidpipe fabrication ease

Core Design Contradiction:

ReliabilityVSEase of manufacture

Solution Approach 1:

The exhaust pipe employs a curved cross-sectional shape (e.g., oval or rounded rectangular) instead of sharp angular shapes. This curvature eliminates dead zones where gas flow stagnation would occur, preventing by-product accumulation and particle generation while maintaining manufacturing feasibility.

Inventive Principle:

Principle #14Spheroidality (Curvature)

Solution Approach 2:

The pipe cross-sectional shape parameters are optimized to balance flow dynamics and manufacturing. Specific curvature radii and aspect ratios are selected to ensure smooth gas flow transition and eliminate stagnation zones, while keeping the geometry simple enough for standard fabrication processes.

Inventive Principle:

Principle #35Parameter changes

3Reliability

If complex polyhedral pipe structures are implemented to eliminate gas flow stagnation, then by-product accumulation is reduced, but device complexity and manufacturing precision requirements increase

Engineering Contradiction:

Improvegas flow uniformityVSAvoidpipe geometry precision

Core Design Contradiction:

ReliabilityVSManufacturing precision

Solution Approach 1:

The exhaust pipe employs a curved cross-sectional shape (e.g., oval or rounded rectangular) instead of sharp angular shapes. This curvature eliminates dead zones where gas flow stagnation would occur, preventing by-product accumulation and particle generation while maintaining manufacturing feasibility.

Inventive Principle:

Principle #14Spheroidality (Curvature)

Solution Approach 2:

The pipe cross-sectional shape parameters are optimized to balance flow dynamics and manufacturing. Specific curvature radii and aspect ratios are selected to ensure smooth gas flow transition and eliminate stagnation zones, while keeping the geometry simple enough for standard fabrication processes.

Inventive Principle:

Principle #35Parameter changes

Data Source

PatentUS12540695B2Conversion pipe arrangement, substrate processing apparatus, method of processing substrate, and method of manufacturing semiconductor device

Publication Date: 2026.02.03 KOKUSAI DENKI KK

AI summary

There is provided a technique that includes: a first connector including a first opening including two longitudinally extending parallel sides and configured to provide a detachable connection to an opening of a first counterpart; and a second connector including a substantially circular second opening and configured to be connectable to an opening of a second counterpart; and a pipe including an internal space formed in a shape of a polyhedron and configured to allow fluid communication between the first opening and the second opening.