Polyimide Film Formation via Monomer Parameter Changes
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Solution Overview
Problem
The existing methods for forming polyimide films as insulation in three-dimensional semiconductor device configurations face challenges due to the high relative permittivity of polyimide films, making it difficult to achieve satisfactory burial in concave portions with large aspect ratios and requiring elevated process temperatures.
Innovation Solution
A method involving dehydration condensation of bifunctional acid anhydrides and bifunctional amines, where non-aromatic monomers are used, allowing for the formation of polyimide films with low relative permittivity by alternately supplying processing gases and replacing the atmosphere, enabling precise control and uniformity in film thickness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If polyimide film is used as insulation film in concave portions, then insulation function is provided, but the high relative permittivity of polyimide makes it difficult to achieve satisfactory burial and requires elevated process temperatures
Solution Approach 1:
The patent changes the chemical structure parameter of the monomers from aromatic to non-aromatic type. This parameter change results in polyimide films with lower relative permittivity, which improves the insulation performance and allows for satisfactory burial in concave portions without requiring elevated process temperatures.
2Manufacturing precision
If conventional polyimide film formation method is used, then film is formed on substrate, but the process requires high temperature elevation which complicates the manufacturing process
Solution Approach 1:
The patent changes the monomer type parameter from aromatic to non-aromatic, which fundamentally alters the film formation characteristics. This enables the polyimide film to be formed at lower temperatures while maintaining good control and quality, eliminating the need for high temperature elevation in the conventional process.
3Reliability
If non-aromatic monomers are used, then polyimide films with low relative permittivity are formed, but the monomer selection and process control become more complex
Solution Approach 1:
The patent specifies using non-aromatic monomers with particular functional groups (carboxyl, carboxylic acid anhydride, amino, or amine groups). This parameter specification achieves low relative permittivity polyimide films with excellent insulation properties while maintaining manageable process complexity through clear monomer selection criteria.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for the formation of polyimide films with excellent insulation properties and thermal resistance, suitable for application as an insulation film in three-dimensional device structures, while reducing the need for high temperatures and improving precision in film formation.
Implementation Method 1
forming a polyimide film on a surface of a substrate by dehydration condensation of a first monomer including a bifunctional acid anhydride and a second monomer including a bifunctional amine
Implementation Method 2
evacuating at least one of the first processing gas and the second processing gas from the processing chamber
Data Source
AI summary
According to an embodiment of the present disclosure, a method of forming a polyimide film on a substrate is disclosed. Such method can be easily controlled and form a polyimide film applicable as an insulation film. While a wafer is heated at a temperature at which a polyimide film is formed, a cycle, in which the wafer is sequentially supplied with a first processing gas, for example, containing a PMDA-based first monomer, and a second processing gas containing a non-aromatic monomer, for example, an HMDA-based second monomer, is performed for a predetermined number of times. When the processing gases are switched, a replacement gas is supplied into a reaction tube so that the monomers are not mixed together under the atmosphere in the reaction tube.