Polyimide Insulating Film Thickness for Semiconductor Bonding

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Solution Overview

Problem

Existing semiconductor devices face challenges in reducing size due to complex wiring patterns and warpage issues caused by coefficient mismatches, and reliability is compromised by peeling of insulating sheets not uniformly bonded during thermocompression processes.

Innovation Solution

A semiconductor device design using a metal conductor base and lead frames fixed with a polyimide-based organic insulating film, where the film thickness relationships ensure proper bonding and reduced size integration, eliminating the need for metal processing and enhancing reliability by thinner non-sandwiched film portions.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If insulating sheets are used to fix lead frames to metal conductor base, then electrical insulation is achieved, but peeling occurs during thermocompression processes due to non-uniform bonding

Engineering Contradiction:
Improvebonding reliabilityVSAvoidbond strength uniformity
Core Design Contradiction:
ReliabilityVSStrength

Solution Approach 1:

The patent changes the material parameter from conventional insulating sheets to polyimide-based organic insulating film, which provides uniform bonding characteristics during thermocompression processes. This material parameter change ensures consistent adhesion strength across the entire bonding area, preventing peeling while maintaining electrical insulation between lead frames and metal conductor base.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If complex wiring patterns are used to achieve proper electrical connections, then electrical functionality is achieved, but device size increases

Engineering Contradiction:
Improveelectrical connection reliabilityVSAvoiddevice size
Core Design Contradiction:
ReliabilityVSVolume of moving object

Solution Approach 1:

The patent merges multiple functions into the organic insulating film: it provides electrical insulation, mechanical bonding, and serves as a substrate for simplified wiring patterns. By combining these functions into a single integrated component with optimized thickness distribution, the patent reduces the overall device size while maintaining reliable electrical connections between power elements and lead frames.

Inventive Principle:
Principle #5Merging (Combining)

3Reliability

If thicker insulating film is used throughout, then bonding reliability is improved, but device size and material usage increase

Engineering Contradiction:
Improvebonding reliabilityVSAvoiddevice size
Core Design Contradiction:
ReliabilityVSVolume of moving object

Solution Approach 1:

The patent applies local quality by creating non-uniform thickness distribution in the organic insulating film. The film is thicker at bonding portions where lead frames contact the metal conductor base to ensure reliable bonding, and thinner at non-bonding portions to reduce overall device size and material usage. This localized thickness optimization maintains bonding reliability while minimizing device dimensions.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution allows for compact integration of multiple power elements with improved reliability by ensuring proper bonding and reduced peeling risks, while avoiding costly metal processing and maintaining structural integrity.

Implementation Method 1

a first lead frame and a second lead frame are fixed to a metal conductor base by an organic insulating film made of a polyimide-based material

Methodology Applied
Scientific EffectThermocompression bonding:

Data Source

PatentUS11488895B2Semiconductor device and maunfacturing method of semiconductor device
Publication Date: 2022.11.01 DENSO CORP
  • US11488895B2 patent drawing
  • US11488895B2 patent drawing
  • US11488895B2 patent drawing

AI summary

In a semiconductor device, a first lead frame and a second lead frame are fixed to a metal conductor base by an organic insulating film made of a polyimide-based material. The organic insulating film satisfies relationships of tpress1>tcast1 and tpress2>tcast1, where tpress1 is a thickness of a portion of the organic insulating film sandwiched between the metal conductor base and the first lead frame, tpress2 is a thickness of a portion of the organic insulating film sandwiched between the metal conductor base and the second lead frame, and tcast1 is a thickness of a portion of the organic insulating film that is not sandwiched between the metal conductor base and the first lead frame and is not sandwiched between the metal conductor base and the second lead frame.