Polyimide Membrane Series Filter for Semiconductor Liquid
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Solution Overview
Problem
Current methods for manufacturing chemical liquids used in semiconductor processing, such as resist solutions and rinsing solutions, often fail to achieve sufficient defect inhibition performance due to incomplete removal of microgel and inorganic fine particles, leading to defects during lithography processes.
Innovation Solution
A filtering device is designed with a series arrangement of filters, where the first filter is a porous membrane with a polyimide-based resin and a second filter with a smaller pore size, typically less than 20 nm, made from materials like polyethylene, nylon, or polytetrafluoroethylene, to effectively remove microgel and inorganic particles through a combination of sieving and adsorption effects.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a single filter is used to purify chemical liquid, then the device complexity is low, but the defect inhibition performance is insufficient
Solution Approach 1:
The filtering device is divided into multiple filtering units with different pore sizes (first filtering unit with 1-100 nm, second filtering unit with 0.1-10 nm, third filtering unit with 10-20 nm). Each unit removes different size ranges of impurities, and they work in sequence to achieve comprehensive purification and defect inhibition performance.
Solution Approach 2:
Each filtering unit has a specific pore size optimized for removing particular impurity sizes. The first unit removes larger particles, the second removes microgel, and the third provides final polishing. This localized optimization of filtering characteristics at different stages achieves superior overall performance.
2Reliability
If a polyimide-based resin porous membrane is used for filtration, then the filtration capability is improved, but microgel and inorganic fine particles are not completely removed
Solution Approach 1:
The filtration process is segmented into multiple stages with different pore sizes. The first filtering unit (1-100 nm) removes larger particles, the second filtering unit (0.1-10 nm) specifically targets microgel, and the third filtering unit (10-20 nm) removes inorganic fine particles. This segmented approach ensures complete removal of all impurity types.
Solution Approach 2:
The filtering device uses a composite filtration system combining multiple porous membranes with different pore sizes and material properties. This composite structure leverages the advantages of each material type to achieve comprehensive impurity removal that a single material cannot accomplish alone.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution significantly improves defect inhibition performance by thoroughly removing causative components, reducing defects in semiconductor substrates and ensuring the quality of chemical liquids used in lithography processes.
Implementation Method 1
the first filter is a porous membrane with a polyimide-based resin and a second filter with a smaller pore size, typically less than 20 nm, made from materials like polyethylene, nylon, or polytetrafluoroethylene, to effectively remove microgel and inorganic particles through a combination of sieving and adsorption effects
Implementation Method 2
a filtering device is designed with a series arrangement of filters, where the first filter is a porous membrane with a polyimide-based resin and a second filter with a smaller pore size, typically less than 20 nm, made from materials like polyethylene, nylon, or polytetrafluoroethylene, to effectively remove microgel and inorganic particles through a combination of sieving and adsorption effects
Data Source
AI summary
A filtering device is for obtaining a chemical liquid by purifying a liquid to be purified, and the filtering device has an inlet portion, an outlet portion, a filter A, at least one filter B different from the filter A, and a flow path which includes the filter A and the filter B arranged in series and extends from the inlet portion to the outlet portion, in which the filter A is a porous membrane containing a polyimide-based resin.