Polymer Coriolis Flow Meter Isolation for High-Purity Fluids

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Solution Overview

Problem

Existing Coriolis mass flow meters face challenges in maintaining measurement accuracy and preventing metal contamination in high-purity fluid systems, particularly in semiconductor manufacturing and bio-pharmaceutical processes, due to the use of low-melting point fusible alloys and potential corrosion from harsh chemicals.

Innovation Solution

The development of a Coriolis flow meter with manifolds and flow-sensitive tubes made from polymer materials, integrated with a stainless steel isolating structure to isolate the tubes from external vibrations and contaminants, while using polymer joints and simultaneous welding to ensure balanced moments of inertia.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If metal materials are used for manifolds and flow-sensitive tubes, then structural strength and durability are improved, but metal contamination occurs in high-purity fluid systems

Engineering Contradiction:
Improvestructural strengthVSAvoidmetal contamination
Core Design Contradiction:
StrengthVSObject-generated harmful factors

Solution Approach 1:

The patent changes the material parameter from metal to polymer, specifically using PTFE (Teflon) for the flow-sensitive tube and compatible polymer materials for the manifold. This material substitution eliminates metal contamination while maintaining the required structural integrity through proper polymer selection and design considerations.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs composite construction by combining polymer materials with metal components only where necessary for structural support (such as the isolating structure). The flow path components are exclusively polymer to prevent contamination, while metal elements are isolated from the fluid path. This selective composite approach maintains strength where needed while preventing metal contamination in the fluid system.

Inventive Principle:
Principle #40Composite materials

2Object-generated harmful factors

If polymer materials are used for manifolds and flow-sensitive tubes, then metal contamination is prevented, but corrosion resistance in harsh chemical environments is reduced

Engineering Contradiction:
Improvemetal contaminationVSAvoidcorrosion resistance
Core Design Contradiction:
Object-generated harmful factorsVSReliability

Solution Approach 1:

The patent specifies using PTFE (polytetrafluoroethylene) or other chemically resistant polymer materials for the flow-sensitive tube and manifold. These polymer materials are selected specifically for their exceptional chemical inertness and resistance to corrosion from harsh chemicals, including acids, bases, and solvents commonly found in semiconductor manufacturing and bio-pharmaceutical processes.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs polymer materials that can be easily replaced if degraded, utilizing the advantage of polymer durability in corrosive environments. The polymer components are designed to withstand harsh chemicals while maintaining their integrity, and the modular design allows for easy replacement if necessary.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

3Device complexity

If the flow-sensitive tube is directly attached to the manifold, then device complexity is reduced, but external vibrations interfere with measurement accuracy

Engineering Contradiction:
Improvestructural simplicityVSAvoidmeasurement accuracy
Core Design Contradiction:
Device complexityVSMeasurement precision

Solution Approach 1:

The patent introduces an isolating structure as an intermediary component between the manifold and the flow-sensitive tube. This isolating structure acts as a vibration isolator that decouples the flow-sensitive tube from external vibrations and mechanical disturbances. The isolating structure can be made from elastomeric or polymeric vibration-damping materials that absorb and dissipate vibrational energy, preventing it from reaching the flow-sensitive tube and affecting measurement accuracy.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent employs flexible vibration-isolating elements or dampening materials in the isolating structure. These flexible components can be elastomeric pads, polymeric dampers, or vibration-isolating coatings that provide mechanical isolation while maintaining the structural integrity of the connection between the manifold and flow-sensitive tube.

Inventive Principle:
Principle #30Flexible shells and thin films

4Manufacturing precision

If welding is used to join polymer components, then manufacturing precision is improved, but the welding process becomes more complex

Engineering Contradiction:
Improvejoint precisionVSAvoidwelding process complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent specifies controlling welding parameters including temperature, pressure, and time to achieve optimal bond strength and precision. By carefully controlling these parameters, the welding process produces precise, contamination-free joints in polymer components while managing the complexity through standardized procedures and equipment.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design reduces metal contamination, enhances measurement sensitivity, and improves accuracy by minimizing external vibration interference and corrosion resistance, suitable for high-purity fluid applications.

Implementation Method 1

A liquid or gas flows through a tube that is being vibrated by a small actuator. The vibrations generate Coriolis accelerations in the liquid or gas flowing through the tube. The Coriolis acceleration of the fluid stream produces a force acting on the tube that can be measured as a phase shift in the vibration frequency of the tube.

Methodology Applied
Scientific EffectCoriolis force: Coriolis Force

Data Source

PatentUS20260016328A1Coriolis mass flow rate sensor
Publication Date: 2026.01.15 MALEMA ENGINEERING CORP
  • US20260016328A1 patent drawing
  • US20260016328A1 patent drawing
  • US20260016328A1 patent drawing

AI summary

Devices and methods include a Coriolis flow meter including a first and second manifolds made from a polymer material. Each manifold includes a respective tubular port extension extending outward from a surface of the manifold. A flow-sensitive tube made from the polymer material is attached at a first end to the first tubular port extension and attached at a second end to the second tubular port extension. An isolating structure is clamped around a portion of the first tubular port extension and positioned adjacent to the surface of the first manifold. The isolating structure is made from a second material different from the polymer material.