Polymer Diaphragm Casting for MEMS Transducer Stability
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Solution Overview
Problem
Current methods for manufacturing MEMS sound transducers lack efficiency in forming a diaphragm around piezoelectric elements, leading to potential breakage and instability during sound wave generation and detection, especially in the ultrasonic range.
Innovation Solution
A method involving a flowable and curable polymer is cast around the piezoelectric element on a support substrate, forming a diaphragm that adapts to the element's contour and provides elasticity, stabilizing the piezoelectric element and enhancing vibration behavior.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If traditional manufacturing methods are used to form a diaphragm around piezoelectric elements, then the manufacturing process is simpler, but the piezoelectric elements are prone to breakage and exhibit unstable vibration behavior
Solution Approach 1:
The patent utilizes the phase transition of polymer material from liquid (flowable) to solid (cured) state to form the diaphragm. By controlling the curing parameters, the polymer adapts to the piezoelectric element's contour and provides stable mechanical support, eliminating breakage issues while maintaining manufacturing simplicity through a single casting process.
Solution Approach 2:
The patent creates a composite structure where the polymer diaphragm encapsulates the piezoelectric element. This composite material approach combines the electrical properties of the piezoelectric element with the mechanical stability and elasticity of the cured polymer, resulting in enhanced reliability and vibration behavior without complicating the manufacturing process.
2Stability of the object's composition
If a rigid diaphragm structure is used, then structural stability is improved, but vibration behavior and elasticity are reduced
Solution Approach 1:
The patent employs a polymer material that transitions from liquid to solid state, allowing the diaphragm to achieve both structural stability and elasticity. The cured polymer maintains a stable composite structure while inherently providing the necessary elasticity for effective vibration and sound wave generation, eliminating the need to choose between rigidity and flexibility.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method effectively stabilizes the piezoelectric elements, reduces the risk of breakage, and improves the vibration behavior, enabling efficient sound wave generation and detection across audible and ultrasonic ranges.
Implementation Method 1
The piezoelectric element has piezoelectric properties, and so the piezoelectric element can convert an electrical signal or a voltage into a deformation, so that the sound waves can be generated as a result. The piezoelectric element can also convert deformations into an electrical signal or a voltage
Implementation Method 2
The polymer can have, for example, such a viscosity that it automatically flows around the piezoelectric element. The flowable polymer therefore adapts, in particular on its own, to a contour and/or possible unevenness
Data Source
AI summary
A method for manufacturing a MEMS sound transducer for generating and/or detecting sound waves in the audible wavelength range and/or in the ultrasonic range, includes arranging at least one piezoelectric element on a support substrate. A diaphragm is formed on the at least one piezoelectric element. In forming the diaphragm, a flowable and curable polymer, which forms the diaphragm after curing, is at least partially cast around the at least one piezoelectric element. The invention further relates to the MEMS sound transducer formed by the method.