Polymer-Free Optical Support Using Flexible Metal Springs
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Solution Overview
Problem
Existing support structures for optical elements in lithographic equipment face contamination issues due to organic polymers and adhesives, which degrade performance by failing to effectively decouple optical elements from mechanical stresses and thermal strains.
Innovation Solution
A support structure utilizing flexible metal members with an inorganic adhesive to isolate optical elements from stresses and strains, eliminating organic materials and facilitating precise alignment, where the flexible metal members act like springs and the inorganic adhesive is composed of metal oxides or ceramic materials.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If organic polymer compliant material and organic adhesive are used to support optical elements, then the optical element can be decoupled from mechanical stresses and thermal strain, but contamination problems occur that degrade optical performance
Solution Approach 1:
The patent removes organic polymer materials and organic adhesives from the optical element support structure. Specifically, it eliminates compliant material comprising organic polymer and adhesive comprising organic polymer from the mounting structure, replacing them with inorganic alternatives to prevent contamination of optical elements and maintain optical performance.
Solution Approach 2:
The patent changes the material composition parameters from organic to inorganic. It specifies that the compliant material should not comprise organic polymer and the adhesive should not comprise organic polymer, fundamentally altering the chemical composition parameters of the support structure to eliminate contamination sources while maintaining mechanical functionality.
2Reliability
If rigid mounting is used to secure optical elements, then structural stability is improved, but the optical element becomes susceptible to mechanical stresses and thermal strain
Solution Approach 1:
The patent employs flexible metal members as compliant support structures to mount optical elements. These flexible members provide mechanical compliance that decouples the optical element from stresses and thermal strain in the mount, while still providing secure support. The flexible nature of these members allows thermal and mechanical deformation without transmitting stress to the optical element.
3Manufacturing precision
If compliant material is used to reduce induced deformations, then optical element deformation is minimized, but organic materials introduce contamination risks
Solution Approach 1:
The patent removes organic polymer compliant material from the support structure and replaces it with inorganic compliant material such as flexible metal members. This extraction eliminates the contamination source while preserving the compliance function that minimizes induced deformations to the optical element.
Solution Approach 2:
The patent uses inorganic composite materials comprising metal oxides or ceramic materials for the adhesive, replacing organic polymer adhesives. These inorganic composite materials provide the necessary adhesive bonding strength while eliminating the contamination risks associated with organic materials, and work in conjunction with flexible metal members to maintain optical element alignment.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively decouples optical elements from mechanical and thermal stresses, preventing contamination and ensuring precise alignment, thereby enhancing the performance and reliability of optical systems.
Implementation Method 1
a plurality of flexible metal members, each flexible metal member having a first end affixed to or integrally extending from the mount, and a free end defining a bearing surface for supporting an optical element
Data Source
AI summary
An assembly for fixing an optical element in a manner that decouples the optical element from mechanical stresses and thermal strains while providing freedom to facilitate alignment of the optical element, and while also eliminating polymers that can cause contamination problems including a mount configured for attachment to an optical system; a plurality of flexible metal members, each flexible member having a first end affixed to or integrally extending from the mount, and a free end defining a bearing surface for supporting an optical element; and an inorganic adhesive joining a surface of the optical member to the bearing surface.