Polymer Via Plugs Preventing Solder Diffusion in Semiconductors

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Solution Overview

Problem

During semiconductor fabrication, solder can diffuse into and through metallization structures, damaging semiconductor devices due to its ability to wick into vias and cause electrical connections to fail.

Innovation Solution

The use of polymer via plugs, such as polyimide, is introduced to fill the vias, which can withstand soldering and operating temperatures, preventing solder from diffusing into the metallization structures.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If solder is used to create electrical connections, then electrical and mechanical connections are facilitated, but solder may wick into vias and diffuse through metallization structures causing damage

Engineering Contradiction:
Improveelectrical connection reliabilityVSAvoidsolder diffusion damage
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

A polymer material is introduced as an intermediary substance within the vias to prevent direct contact between the solder and the metallization structures. The polymer acts as a barrier layer that blocks solder diffusion while allowing the soldering process to proceed normally on the surface, thus protecting the internal structures from harmful solder penetration.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The polymer is applied to the vias before the soldering process occurs, creating a preventive barrier in advance. This preliminary action prevents the harmful effect of solder wicking and diffusion before it can occur, rather than attempting to address the problem after damage has happened.

Inventive Principle:
Principle #9Preliminary anti-action

2Object-affected harmful factors

If polymer via plugs are used to prevent solder diffusion, then solder protection is improved, but the device complexity increases

Engineering Contradiction:
Improvesolder diffusion preventionVSAvoidfabrication process complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The polymer material undergoes a parameter change from liquid to solid state through curing, transforming from an easy-to-apply liquid form during the filling process to a stable solid barrier that provides effective solder protection. This phase transition simplifies the overall process by using a material that can be easily applied but then becomes a robust protective structure.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The polymer via plugs effectively prevent solder from entering the vias during soldering processes, thereby protecting the semiconductor devices from damage and ensuring reliable electrical connections.

Implementation Method 1

providing a polymer in liquid form over a second surface in a vacuum such that the polymer in liquid form flows into the at least one via

Methodology Applied
Scientific EffectVacuum: Vacuum

Implementation Method 2

curing the polymer to form a solidified via plug

Methodology Applied
Scientific EffectCuring: Photopolymerisation

Data Source

PatentUS10020244B2Polymer via plugs with high thermal integrity
Publication Date: 2018.07.10 WOLFSPEED INC
  • US10020244B2 patent drawing
  • US10020244B2 patent drawing
  • US10020244B2 patent drawing

AI summary

The present disclosure relates to providing via plugs in vias of a semiconductor material. The via plugs may be formed of a polymer, such as a polyimide, that can withstand subsequent soldering and operating temperatures. The via plugs effectively fill the vias to prevent the vias from being filled substantially with solder during a subsequent soldering processes.