Metal Lapping Carrier with Polymeric Coating for Abrasive Dulling
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Solution Overview
Problem
In dual-sided lapping applications, asymmetrical polishing occurs due to dulling of fixed abrasives by carrier materials, leading to excessive carrier wear and reduced throughput, and the use of alternative materials like polymeric carriers becomes impractical for thin, large workpieces due to flexibility issues.
Innovation Solution
A lapping carrier with a metal base and polymeric regions on its surfaces, where the polymeric regions have a work-to-failure of at least 10 Joules, and an adhesion promoting layer is interposed between the polymeric regions and the base carrier to enhance durability and reduce abrasive dulling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If fixed abrasive is used on platens, then maintenance costs are reduced and unproductive time is reduced, but asymmetrical polishing occurs due to dulling of the fixed abrasive by carrier materials
Solution Approach 1:
A polymeric coating is applied as an intermediary layer between the metal carrier and the fixed abrasive. This coating mediates the interaction by preventing direct contact between the carrier material and abrasive, thereby eliminating asymmetrical polishing while maintaining the benefits of fixed abrasive usage.
Solution Approach 2:
The carrier is constructed as a composite structure with a metal base carrier and a polymeric coating layer. This composite design combines the structural integrity of metal with the abrasive-resistant properties of polymeric materials, solving the dulling problem while preserving productivity advantages.
2Productivity
If fixed abrasive contacts carrier, then polishing operation is maintained, but excessive carrier wear occurs making carriers too thin and causing mid-cycle crashes
Solution Approach 1:
The polymeric coating serves as a protective intermediary that prevents direct wear between the carrier and abrasive. This extends carrier life by preventing the carrier material from being consumed, thereby eliminating mid-cycle crashes and maintaining operational continuity.
Solution Approach 2:
The polymeric coating is applied beforehand to cushion and protect the carrier from abrasive contact. This preventive measure ensures the carrier maintains sufficient thickness throughout operation, preventing premature failure and extending its service life.
3Manufacturing precision
If polymeric carriers are used to avoid abrasive dulling, then asymmetrical polishing is prevented, but the carriers become too flexible for thin, large workpieces
Solution Approach 1:
The carrier uses a composite structure where a metal base carrier provides the necessary rigidity and structural strength, while a polymeric coating layer provides the abrasive-resistant surface. This resolves the contradiction by combining materials with complementary properties.
Solution Approach 2:
Only the surface layer in contact with the abrasive is made polymeric to provide wear resistance, while the bulk of the carrier remains metal to provide structural integrity. This local differentiation allows the carrier to simultaneously achieve both polishing symmetry and sufficient rigidity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution significantly reduces abrasive dulling and extends carrier life, maintaining uniform polishing performance and preventing mid-cycle crashes, thereby improving process throughput and extending the life of the carriers.
Implementation Method 1
the polymeric region comprises a polymer having a work to failure of at least about 10 Joules
Data Source
AI summary
Provided is a double-sided lapping carrier comprising a base carrier having a first major surface, a second major surface and at least one aperture for holding a workpiece, said aperture extending from the first major surface through the base carrier to the second major surface, wherein the base carrier comprises a first metal, the circumference of said aperture is defined by a third surface of the base carrier consisting of the first metal and, at least a portion of the first major surface or at least a portion of each of the first and the second major surfaces comprises a polymeric region, said polymeric region comprising a polymer having a work to failure of at least 10 Joules. Also provide are methods of lapping.