Polymeric Getter Encapsulation for Fluorochemical Lubricant Isolation
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Solution Overview
Problem
Current gettering material techniques in microelectronic device packages fail to effectively remove water and aldehydes, leading to performance degradation of digital light processing (DLP) spatial light modulators or Digital Micromirror Devices (DMDs) due to reactions with fluorochemical lubricants, especially under UV light exposure.
Innovation Solution
Incorporating a polymeric component that substantially encapsulates the gettering material and fluorochemical lubricant, preventing reactions between them, and using a second gettering material to remove byproducts, allowing for selective release of the lubricant at elevated temperatures.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If gettering material is used to remove water and aldehydes, then headspace cleanliness is improved, but reaction with fluorochemical lubricant causes performance degradation
Solution Approach 1:
The patent divides the headspace into separate compartments: a first headspace containing the fluorochemical lubricant and a second headspace containing the gettering material, with a partition barrier between them. This segmentation prevents direct contact and reaction between the lubricant and gettering material while allowing each to perform its function independently in its designated space.
Solution Approach 2:
The partition acts as an intermediary barrier between the fluorochemical lubricant and the gettering material. This intermediate structure prevents harmful reactions while still enabling the system to achieve its overall function of maintaining headspace cleanliness and device reliability.
2Productivity
If gettering material is exposed to fluorochemical lubricant, then water and aldehyde removal is enhanced, but premature reaction occurs
Solution Approach 1:
By segmenting the headspace into separate compartments with a partition, the patent allows the gettering material to remain active and ready for water and aldehyde removal without prematurely reacting with the fluorochemical lubricant. Each component maintains its functionality throughout the device's service life.
Solution Approach 2:
The partition is pre-installed to prevent contact between the gettering material and fluorochemical lubricant from the outset. This preliminary preventive measure ensures that the gettering material remains effective for its intended purpose without undergoing premature reactions that would reduce service life.
3Reliability
If polymeric component encapsulates gettering material, then reaction prevention is achieved, but release control is required
Solution Approach 1:
The patent uses a partition that effectively segments the headspace into separate compartments. This segmentation achieves reaction prevention through simple physical separation rather than complex encapsulation structures, maintaining reliability while avoiding unnecessary complexity.
Solution Approach 2:
The partition can be implemented as a thin film or flexible barrier that provides effective separation between the fluorochemical lubricant and gettering material. This thin film approach prevents reactions without requiring bulky or complex encapsulation structures.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach prevents premature reactions, maintains device reliability, and extends the lifetime of microelectronic devices by isolating the gettering material from fluorochemical lubricants, ensuring a cleaner headspace and robust device performance.
Implementation Method 1
The polymeric component substantially encapsulates the gettering material
Implementation Method 2
The polymeric component substantially encapsulates the fluorochemical lubricant
Implementation Method 3
certain fluorochemical lubricants within the package headspace are important for reliable operation, while water and certain organic compounds (e.g., aldehydes) which may also be present within the package headspace can lead to performance degradation
Data Source
AI summary
A microelectronic device package includes a host material and a gettering material. The microelectronic device package also includes a polymeric component between the host material and the gettering material. The polymeric component substantially encapsulates the gettering material. The microelectronic device package further includes a fluorochemical lubricant. The polymeric component serves to prevent a reaction between the fluorochemical lubricant and the gettering material. Alternatively, the fluorochemical lubricant may be encapsulated by a polymeric component and may be released upon an increase in temperature during or after a packaging step.


