Polymeric Getter Encapsulation for Fluorochemical Lubricant Isolation

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Solution Overview

Problem

Current gettering material techniques in microelectronic device packages fail to effectively remove water and aldehydes, leading to performance degradation of digital light processing (DLP) spatial light modulators or Digital Micromirror Devices (DMDs) due to reactions with fluorochemical lubricants, especially under UV light exposure.

Innovation Solution

Incorporating a polymeric component that substantially encapsulates the gettering material and fluorochemical lubricant, preventing reactions between them, and using a second gettering material to remove byproducts, allowing for selective release of the lubricant at elevated temperatures.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If gettering material is used to remove water and aldehydes, then headspace cleanliness is improved, but reaction with fluorochemical lubricant causes performance degradation

Engineering Contradiction:
Improvedevice performanceVSAvoidreaction products
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent divides the headspace into separate compartments: a first headspace containing the fluorochemical lubricant and a second headspace containing the gettering material, with a partition barrier between them. This segmentation prevents direct contact and reaction between the lubricant and gettering material while allowing each to perform its function independently in its designated space.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The partition acts as an intermediary barrier between the fluorochemical lubricant and the gettering material. This intermediate structure prevents harmful reactions while still enabling the system to achieve its overall function of maintaining headspace cleanliness and device reliability.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Productivity

If gettering material is exposed to fluorochemical lubricant, then water and aldehyde removal is enhanced, but premature reaction occurs

Engineering Contradiction:
Improvegettering efficiencyVSAvoidservice life
Core Design Contradiction:
ProductivityVSDuration of action of stationary object

Solution Approach 1:

By segmenting the headspace into separate compartments with a partition, the patent allows the gettering material to remain active and ready for water and aldehyde removal without prematurely reacting with the fluorochemical lubricant. Each component maintains its functionality throughout the device's service life.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The partition is pre-installed to prevent contact between the gettering material and fluorochemical lubricant from the outset. This preliminary preventive measure ensures that the gettering material remains effective for its intended purpose without undergoing premature reactions that would reduce service life.

Inventive Principle:
Principle #10Preliminary action

3Reliability

If polymeric component encapsulates gettering material, then reaction prevention is achieved, but release control is required

Engineering Contradiction:
Improvereaction preventionVSAvoidencapsulation structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent uses a partition that effectively segments the headspace into separate compartments. This segmentation achieves reaction prevention through simple physical separation rather than complex encapsulation structures, maintaining reliability while avoiding unnecessary complexity.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The partition can be implemented as a thin film or flexible barrier that provides effective separation between the fluorochemical lubricant and gettering material. This thin film approach prevents reactions without requiring bulky or complex encapsulation structures.

Inventive Principle:
Principle #30Flexible shells and thin films

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach prevents premature reactions, maintains device reliability, and extends the lifetime of microelectronic devices by isolating the gettering material from fluorochemical lubricants, ensuring a cleaner headspace and robust device performance.

Implementation Method 1

The polymeric component substantially encapsulates the gettering material

Methodology Applied
Scientific EffectPhysical containment: Physical Containment

Implementation Method 2

The polymeric component substantially encapsulates the fluorochemical lubricant

Methodology Applied
Scientific EffectPhysical containment: Physical Containment

Implementation Method 3

certain fluorochemical lubricants within the package headspace are important for reliable operation, while water and certain organic compounds (e.g., aldehydes) which may also be present within the package headspace can lead to performance degradation

Methodology Applied
Scientific EffectGettering: Gettering

Data Source

PatentUS11345589B2Selective gettering through phase segregation and temperature dependent storage and release structure for lubricant
Publication Date: 2022.05.31 TEXAS INSTRUMENTS INC
  • US11345589B2 patent drawing
  • US11345589B2 patent drawing
  • US11345589B2 patent drawing

AI summary

A microelectronic device package includes a host material and a gettering material. The microelectronic device package also includes a polymeric component between the host material and the gettering material. The polymeric component substantially encapsulates the gettering material. The microelectronic device package further includes a fluorochemical lubricant. The polymeric component serves to prevent a reaction between the fluorochemical lubricant and the gettering material. Alternatively, the fluorochemical lubricant may be encapsulated by a polymeric component and may be released upon an increase in temperature during or after a packaging step.