Polymeric MMI Coupler for Heterogeneous Integration

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Solution Overview

Problem

Current heterointegration techniques for III-V compound semiconductor photonics with silicon photonics face challenges such as high series electrical resistance, optical losses, and limited design flexibility due to reliance on evanescent coupling and specialized designs, which restrict the thickness of the undercladding and compatibility with different material systems.

Innovation Solution

The use of a multimode interference (MMI) coupler as an intermediary waveguide, made from a polymeric material like polyimide, which is tapered to enable non-adiabatic transfer of optical modes between the silicon-based waveguide and the III-V device, allowing for thicker undercladding and adhesive bonding over rough surfaces, thereby relaxing material compatibility and design constraints.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If evanescent coupling is used to bond III-V devices onto silicon platform, then optical coupling between waveguides is achieved, but the undercladding must be optically thin leading to very high series electrical resistance and low efficiency

Engineering Contradiction:
Improveoptical coupling efficiencyVSAvoidseries electrical resistance
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The patent introduces a polymer adhesive layer as an intermediary bonding medium between the III-V device and silicon platform. This mediator enables mechanical bonding without requiring the undercladding to be optically thin, thus decoupling the optical coupling function from the electrical conduction function. The polymer layer allows the undercladding to be thicker for lower electrical resistance while maintaining effective optical coupling through the bonding interface.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Ease of manufacture

If direct wafer bonding is used to bond III-V semiconductors onto silicon surfaces, then heterogeneous integration is achieved, but the bonded interface bisects the hybrid optical mode making devices highly susceptible to interface-induced optical losses

Engineering Contradiction:
Improvebonding processVSAvoidinterface-induced optical losses
Core Design Contradiction:
Ease of manufactureVSLoss of energy

Solution Approach 1:

The polymer adhesive layer serves as an intermediary that modifies the bonding interface characteristics. It provides a compliant, optically transparent medium that reduces the abruptness of the material interface, thereby minimizing mode discontinuity and reducing interface-induced optical losses while still enabling strong mechanical bonding between the dissimilar materials.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Reliability

If specialized designs are used for evanescent coupling, then coupling between specific III-V devices and silicon waveguides is achieved, but interchangeability and design flexibility are limited

Engineering Contradiction:
Improvecoupling efficiencyVSAvoiddesign flexibility
Core Design Contradiction:
ReliabilityVSAdaptability or versatility

Solution Approach 1:

The patent employs a universal polymer adhesive bonding approach that can accommodate various III-V device types and material compositions (such as InP, InGaAsP, GaAs, AlGaAs) on silicon platforms. This universal bonding methodology provides design flexibility and interchangeability, allowing different active layers, cladding configurations, and device geometries to be integrated without requiring specialized coupling designs for each material system.

Inventive Principle:
Principle #6Universality (Multi-functionality)

4Reliability

If thin adhesive polymer layer is used to bond III-V laser to silicon photonic chip, then vertical coupling is achieved, but the undercladding thickness is still relatively thin limiting electrical and thermal properties

Engineering Contradiction:
Improvevertical couplingVSAvoidelectrical and thermal properties
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The patent utilizes the vertical dimension to allow thicker undercladding layers beneath the active region while maintaining effective optical coupling through the polymer adhesive layer. By separating the optical coupling function (handled by the polymer layer at the bonding interface) from the electrical/thermal conduction function (handled by the thicker undercladding), the design achieves improved electrical and thermal properties without compromising vertical optical coupling efficiency.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach achieves coupling losses less than 1 dB, permits thicker undercladding, and enhances electrical and thermal properties, offering greater flexibility in device design and compatibility with various material systems, including III-phosphides, III-arsenides, and lithium niobate.

Implementation Method 1

the polymeric waveguide is conformed as a multimode interference (MMI) coupler between the introduced semiconductor device and the silicon-based waveguide

Methodology Applied
Scientific EffectMultimode interference: Interference

Implementation Method 2

at least the polymeric waveguide, and in embodiments, also the silicon-based waveguide, is tapered with a shape that effectuates optical coupling to the silicon-based waveguide

Methodology Applied
Scientific EffectOptical mode transfer: Waveguide (optics)

Implementation Method 3

the polymeric waveguide is conformed as a multimode interference (MMI) coupler between the introduced semiconductor device and the silicon-based waveguide. At least the polymeric waveguide, and in embodiments, also the silicon-based waveguide, is tapered with a shape that effectuates optical coupling

Methodology Applied
Scientific EffectNon-adiabatic mode transfer: Waveguide (optics)

Data Source

PatentUS11163115B1Optical coupler for heterogeneous integration
Publication Date: 2021.11.02 NATIONAL TECHNOLOGY & ENGINEERING SOLUTIONS OF SANDIA LLC
  • US11163115B1 patent drawing
  • US11163115B1 patent drawing
  • US11163115B1 patent drawing

AI summary

In an optical apparatus, an introduced semiconductor device is heterointegrated on a silicon-based platform containing a silicon-based waveguide. A polymeric waveguide is optically coupled to the introduced semiconductor device and overlies at least a portion of the silicon-based waveguide. The polymeric waveguide is conformed as a multimode interference (MMI) coupler between the introduced semiconductor device and the silicon-based waveguide. At least the polymeric waveguide, and in embodiments, also the silicon-based waveguide, is tapered with a shape that effectuates optical coupling to the silicon-based waveguide.