Polyorganosiloxane Stamp Manufacturing via Partial Curing

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Solution Overview

Problem

The challenge in manufacturing polyorganosiloxane-based stamps is achieving good chemical adhesion between the stamp and support layers while maintaining a high elastic modulus, which is often compromised due to poor inter-layer crosslinking and diffusion of components during co-curing, leading to unpredictable Young's modulus and adhesion issues.

Innovation Solution

A method involving a partially cured first layer coated with a thinner second layer, where the second layer's thickness and catalyst concentration are optimized to minimize component migration, ensuring high crosslink density and adhesion through co-curing, with the second layer acting as an adhesion layer for the support layer, thereby maintaining a high Young's modulus in the stamp layer.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a high elastic modulus stamp layer is used to ensure faithful pattern replication, then pattern fidelity is improved, but the stamp layer becomes relatively brittle and adhesion to the support layer deteriorates

Engineering Contradiction:
Improvepattern fidelityVSAvoidadhesion strength
Core Design Contradiction:
Manufacturing precisionVSStrength

Solution Approach 1:

The stamp structure is divided into two distinct layers: a thin stamp layer (5-20 μm) for high elastic modulus and pattern fidelity, and a thicker support layer (50-200 μm) for flexibility and adhesion. This segmentation allows each layer to optimize its function without compromising the other.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The invention uses a composite structure combining two polyorganosiloxane materials with different properties. The stamp layer uses a highly crosslinked material (e.g., Sylgard 184) for high elastic modulus, while the support layer uses a less crosslinked material for flexibility, creating a composite system that balances both requirements.

Inventive Principle:
Principle #40Composite materials

2Strength

If co-curing is used to improve adhesion between layers, then inter-layer crosslinking is enhanced, but diffusion of components during co-curing leads to unpredictable Young's modulus

Engineering Contradiction:
Improveadhesion strengthVSAvoidYoung's modulus control
Core Design Contradiction:
StrengthVSManufacturing precision

Solution Approach 1:

The stamp layer is partially cured before applying the support layer composition. This preliminary curing action creates a stable, highly crosslinked stamp layer that resists component diffusion during subsequent co-curing, thereby maintaining predictable Young's modulus while still allowing adhesion formation.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The stamp layer is only partially cured (not fully cured) before applying the support layer. This partial curing provides enough crosslinking to maintain structural integrity and resist diffusion, while leaving sufficient reactive groups for adhesion during co-curing.

Inventive Principle:
Principle #16Partial or excessive action

3Manufacturing precision

If the stamp layer is made thinner to improve pattern replication, then pattern fidelity is improved, but the stamp layer becomes more brittle and harder to handle

Engineering Contradiction:
Improvepattern fidelityVSAvoidhandling reliability
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The stamp structure is divided into a thin stamp layer (5-20 μm) for high elastic modulus and pattern fidelity, and a thicker support layer (50-200 μm) for flexibility and adhesion. This segmentation allows each layer to optimize its function without compromising the other.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively enhances the chemical adhesion between the stamp and support layers, maintaining a high Young's modulus in the stamp layer, ensuring faithful replication of fine patterns and improved longevity by preventing catalyst diffusion and maintaining a high crosslink density.

Implementation Method 1

a catalyst for catalysing crosslinking of the reactive branched and first reactive linear polyorganosiloxanes

Methodology Applied
Scientific EffectCatalysis: Catalysis

Implementation Method 2

diffusion of components during co-curing

Methodology Applied
Scientific EffectDiffusion: Diffusion

Implementation Method 3

co-curing the partially cured first layer and the second layer to form a cured first layer having a first Young's modulus, adhered to a cured second layer

Methodology Applied
Scientific EffectCrosslinking: Chemical Bonding

Data Source

PatentUS11338477B2Polyorganosiloxane-based stamp manufacturing method, polyorganosiloxane-based stamp, use of the same for a printing process, and an imprinting method using the same
Publication Date: 2022.05.24 KONINKLIJKE PHILIPS NV
  • US11338477B2 patent drawing
  • US11338477B2 patent drawing
  • US11338477B2 patent drawing

AI summary

Disclosed is a method of manufacturing a polyorganosiloxane-based stamp comprising providing a master including a transfer pattern surface; forming a first layer of a first curable composition onto the transfer pattern surface such that the first layer includes a relief pattern of said transfer pattern; partially curing the first layer; depositing a second layer of a second curable composition onto the partially cured first layer; co-curing the partially cured first layer and the second layer to form a cured first layer having a first Young's modulus, adhered to a cured second layer having a second Young's modulus smaller than the first Young's modulus; depositing a third layer of a third curable composition onto the second layer, and curing the third layer to form a cured third layer adhered to the cured second layer. Further disclosed is a polyorganosiloxane-based stamp obtainable from the method; use of the same for printing process; and an imprinting method using the same.