Polysilazane Film Formation via Two-Step Conversion Process

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Solution Overview

Problem

Conventional polysilazane compositions undergo complete conversion reactions quickly, making it difficult to perform secondary processing treatments for forming a dense siliceous film, and incomplete conversion results in an uncured coating layer that is hard to handle.

Innovation Solution

A two-step conversion process using a composition comprising an amine compound, polysilazane, and a solvent, where the coating layer is first formed with a dry surface and then subjected to secondary treatments like heat, humidifying, or plasma treatments to form a dense siliceous film.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If conventional polysilazane composition is used to form a coating layer, then the conversion reaction proceeds rapidly and finishes completely, but it becomes difficult to carry out secondary processing treatments to form a dense siliceous film

Engineering Contradiction:
Improveconversion reaction speedVSAvoidprocessability for secondary treatment
Core Design Contradiction:
ProductivityVSAdaptability or versatility

Solution Approach 1:

The conversion process is divided into two distinct stages: first forming a coating layer with controlled incomplete conversion that can be handled, then performing secondary processing to achieve complete conversion and dense siliceous film formation. This segmentation allows each stage to be optimized independently.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The composition is designed to undergo preliminary conversion to form a stable coating layer before secondary processing. The amine compound and water control the initial conversion rate to create a handleable intermediate state that serves as preparation for the final dense film formation.

Inventive Principle:
Principle #10Preliminary action

2Adaptability or versatility

If polysilazane composition is completely prevented from undergoing conversion reaction to enable secondary processing, then the coating layer cannot be fixed on the substrate, but the substrate coated with composition becomes difficult to handle

Engineering Contradiction:
Improveprocessability for secondary treatmentVSAvoidhandleability of coated substrate
Core Design Contradiction:
Adaptability or versatilityVSEase of operation

Solution Approach 1:

The composition parameters are precisely controlled to achieve partial conversion - enough to fix the coating on the substrate and improve handleability, but not so much that it becomes difficult to process. The amine compound concentration and water content are optimized to create this intermediate state.

Inventive Principle:
Principle #35Parameter changes

3Productivity

If conventional polysilazane composition is designed to complete conversion quickly, then productivity is improved, but the coating layer becomes uncured and cannot be kept fixed on substrate for a certain period

Engineering Contradiction:
Improveconversion completion speedVSAvoidcoating fixation time
Core Design Contradiction:
ProductivityVSDuration of action of stationary object

Solution Approach 1:

The conversion process is made dynamic and controllable through the amine compound and water content, allowing the coating to transition from a handleable intermediate state to a fully converted dense film at the appropriate time. This dynamic control enables both sufficient fixation time and eventual complete conversion.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The process allows for a stable dry-surface film that can be easily handled and further processed to increase the siliceous content, improving coating properties and enabling the formation of a dense siliceous film.

Implementation Method 1

an amine compound... is added as the additive into a polysilazane-containing composition so that the composition can form a siliceous film at a low temperature

Methodology Applied
Scientific EffectCatalysis: Catalysis

Implementation Method 2

Polysilazane compounds can be generally converted into siliceous substances by heating

Methodology Applied
Scientific EffectHydrolysis: Hydrolysis

Implementation Method 3

Polysilazane compounds can be generally converted into siliceous substances by heating

Methodology Applied
Scientific EffectCondensation: Condensation

Implementation Method 4

Polysilazane compounds can be generally converted into siliceous substances by heating

Methodology Applied
Scientific EffectHeating: Heating

Implementation Method 5

coating a substrate with the above composition to form a film having surface dryness

Methodology Applied
Scientific EffectDeposition: Deposition (physical)

Data Source

PatentEP3452556B1Composition for forming dense siliceous film
Publication Date: 2020.04.15 AZ ELECTRONIC MATERIALS (LUXEMBOURG) SARL
  • EP3452556B1 patent drawingFigure 1~2
  • EP3452556B1 patent drawing
  • EP3452556B1 patent drawing

AI summary

[Object]To provide a polysilazane-containing composition for forming a film. In order to form a dense and processable siliceous film, the composition is intended to be employed in a two-step conversion process comprising the steps of: forming a film having a dry surface from the composition provided that the conversion in to the siliceous substance proceeds insufficiently; and then subjecting the film to secondary processing. [Means] The present invention provides a polysilazane-containing film-forming composition comprising a particular amine compound, a polysilazane compound, and a solvent; and the invention also provides a process for forming a siliceous substance. In the process, the composition is applied to coat a substrate and thereafter converted into the siliceous substance. The particular amine compound has two amine groups,and the amine groups have at least one phenyl-substituted hydrocarbon group.