Polysilazane Cured Coating With Fast VUV Densification
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Solution Overview
Problem
Existing methods for producing polysilazane coatings face challenges in achieving low water vapor transmission rates efficiently, requiring prolonged exposure to vacuum ultraviolet light, which affects productivity and increases costs.
Innovation Solution
A method involving the application of a polysilazane compound followed by irradiation with Xe excimer light at specific illuminance levels and in a controlled atmosphere to densify the coating quickly, achieving equivalent or superior gas barrier properties with reduced energy and time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If perhydropolysilazane coating is irradiated with vacuum ultraviolet light to convert it into silicon nitride coating, then water vapor barrier properties are improved, but irradiation time and energy consumption increase
Solution Approach 1:
The patent changes the chemical composition parameters of the polysilazane compound by introducing specific substituents (formula (1) with parameters x, y, z) to modify the coating's reactivity and densification characteristics, enabling faster conversion to silicon nitride with reduced irradiation time while maintaining low water vapor transmission rates
Solution Approach 2:
The patent creates a composite coating system combining polysilazane compound with specific organic substituents and inorganic fillers (such as silicon oxide, silicon nitride particles) to achieve enhanced barrier properties that enable rapid densification under VUV irradiation, reducing the required irradiation time while achieving superior water vapor barrier performance
2Reliability
If perhydropolysilazane coating is irradiated with vacuum ultraviolet light to convert it into silicon nitride coating, then water vapor barrier properties are improved, but energy consumption increases
Solution Approach 1:
The patent modifies the chemical structure parameters of the polysilazane compound (formula (1)) to optimize the energy required for VUV-induced conversion to silicon nitride, achieving lower energy consumption while maintaining high barrier properties through controlled compositional changes
Solution Approach 2:
The patent performs preliminary modifications to the polysilazane compound structure before VUV irradiation, pre-positioning reactive groups and substituents that facilitate easier and more energy-efficient conversion to the dense silicon nitride network during irradiation, thereby reducing overall energy consumption
3Reliability
If vacuum process is used to produce inorganic barrier coating, then water vapor transmission rate is reduced, but material utilization efficiency decreases and manufacturing cost increases
Solution Approach 1:
The patent replaces the vacuum deposition process with a wet coating process followed by atmospheric or near-atmospheric pressure VUV irradiation, substituting mechanical/vacuum-based material delivery with solution-based coating and photochemical conversion, thereby improving material utilization efficiency and productivity while achieving comparable or superior barrier properties
Solution Approach 2:
The patent changes the processing environment parameters from high vacuum to atmospheric or near-atmospheric pressure conditions, enabling more efficient material utilization and higher productivity while maintaining low water vapor transmission rates through the polysilazane-to-silicon nitride conversion mechanism
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method enables the production of a modified polysilazane cured coating with high gas barrier properties in a shorter time and with less energy compared to conventional methods, enhancing productivity and resource efficiency.
Implementation Method 1
When a perhydropolysilazane (PHPS) coating is irradiated with vacuum ultraviolet light (VUV), not only the Si—H bonds and N—H bonds are broken, but also the Si—N bonds in the main chain are repeatedly broken and rebonded, causing atomic rearrangement.
Implementation Method 2
When heated in air, it reacts with oxygen and converts to a SiO2 coating
Data Source
AI summary
A method is provided for producing a modified polysilazane-cured coating that densifies a coating made of a polysilazane compound in a short period of time. This method provides a coating having a sufficiently low water vapor transmission rate in a short period of time. Additionally, this method provides a modified polysilazane-cured coating. To cure the coating containing polysilazane, it is irradiated with vacuum ultraviolet (VUV) light at an intensity within a specific range. The method includes a step of applying a base material containing the polysilazane compound represented by formula (1) to form a coating and irradiating the coating with Xe excimer light to modify the polysilazane compound and form a cured coating of the modified polysilazane compound. The illuminance of the Xe excimer light in the curing step is set to a range of 280 to 450 mW/cm2.