Polysilicon ESD Diode Layout for Compact Semiconductor Dies

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Solution Overview

Problem

Existing semiconductor devices face limitations in effectively protecting against electrostatic discharge (ESD) due to restricted space for ESD protection diodes, which can lead to current crowding and increased electric fields, potentially damaging the diodes during ESD events.

Innovation Solution

A semiconductor die design featuring a polysilicon ESD protection diode with two separate sections electrically coupled in parallel between the gate and source pads, positioned laterally and vertically above a shielding region, avoiding concave sections at corners to reduce current crowding and electric field concentrations, while convex extensions increase the diode's width without occupying additional space.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the ESD protection diode is made larger to increase protection capability, then the HBM protection rating is improved, but the device area increases

Engineering Contradiction:
ImproveHBM protection ratingVSAvoiddevice area
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The ESD protection diode is positioned vertically above the shielding region, utilizing the vertical dimension rather than expanding laterally. This allows the diode to achieve enhanced protection capability through increased width in the vertical plane while maintaining a compact lateral footprint, effectively resolving the contradiction between protection rating and device area.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Area of stationary object

If the ESD protection diode is placed in limited space, then the device size is reduced, but current crowding and electric field concentration increase causing diode damage

Engineering Contradiction:
Improvedevice sizeVSAvoiddiode damage risk
Core Design Contradiction:
Area of stationary objectVSReliability

Solution Approach 1:

By positioning the ESD protection diode vertically above the shielding region and extending it in the vertical direction, the design achieves sufficient current distribution area without lateral expansion. This vertical arrangement prevents current crowding and electric field concentration while maintaining a compact device footprint.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The shielding region acts as an intermediary structure between the ESD protection diode and the underlying circuitry. It provides electrical shielding and supports the vertically positioned diode, enabling the diode to function effectively in a compact space without suffering from current crowding issues.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Ease of manufacture

If conventional ESD protection structures are used, then the implementation is simple, but the protection effectiveness is insufficient

Engineering Contradiction:
Improveimplementation simplicityVSAvoidprotection effectiveness
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The invention maintains implementation simplicity by using standard semiconductor fabrication processes while achieving enhanced protection effectiveness through the vertical positioning of the ESD protection diode above the shielding region. This dimensional approach provides superior protection without complicating the manufacturing process.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design enhances the ESD protection capability of semiconductor devices by reducing the risk of diode damage during ESD events, maintaining a compact device size, and increasing the Human Body Model (HBM) protection rating without expanding the active device area.

Implementation Method 1

semiconductor devices may be subjected to electrostatic discharge (ESD) events

Methodology Applied
Scientific EffectElectrostatic Discharge: Electrostatic Discharge

Implementation Method 2

The polysilicon ESD protection diode is arranged laterally between the gate pad and the source pad and vertically above at least a portion of the shielding region

Methodology Applied
Scientific EffectDiode conduction: Diode

Implementation Method 3

a shielding region laterally surrounding the cell field, the shielding region comprising a non-depletable doped region

Methodology Applied
Scientific EffectElectric Field shielding: Electric Field

Data Source

PatentEP3686929B1Semiconductor die
Publication Date: 2023.09.20 INFINEON TECH DRESDEN GMBH & CO KG
  • EP3686929B1 patent drawingFigure 1
  • EP3686929B1 patent drawingFigure 2a~2b
  • EP3686929B1 patent drawingFigure 3

AI summary

In an embodiment, a semiconductor die comprises a transistor device that comprises a cell field and an edge termination region, a source pad arranged on the cell field, a gate pad laterally arranged laterally adjacent the cell field and in the edge termination region, a shielding region laterally surrounding the cell field, the shielding region comprising a non-depletable doped. The polysilicon ESD protection diode is arranged laterally between the gate pad and the source pad and vertically above at least a portion of the shielding region and comprises at least two separate sections that are electrically coupled in parallel between the gate pad and the source pad. The sections are laterally spaced apart by a gap situated at a corner of the gate pad.