Interchangeable Tray Polysilicon Feeder for Czochralski Growth

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Solution Overview

Problem

Existing polysilicon feed systems for the Czochralski method lack a satisfactory apparatus and method for efficiently feeding both granular and chunk polysilicon to the crucible melt, requiring separate and optimized feeders for each type.

Innovation Solution

A feed assembly with interchangeable granular and chunk trays, coupled with a magnetic pulse vibrator and a valve mechanism, allows for controlled feeding of either granular or chunk polysilicon to the growth chamber, enabling efficient adaptation to different polysilicon types.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If separate feeders are used for granular and chunk polysilicon, then each feeder can be optimized for its specific polysilicon type, but the device complexity increases and versatility decreases

Engineering Contradiction:
Improvefeeding efficiencyVSAvoidfeeder system complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent applies universality by designing a single polysilicon feeder that can handle both granular and chunk polysilicon types. The feeder includes interchangeable trays (granular tray and chunk tray) that can be swapped depending on the polysilicon type being used. This multi-functional design eliminates the need for separate feeders for each polysilicon type, reducing device complexity while maintaining feeding efficiency for both materials.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Device complexity

If a single feeder is used for both granular and chunk polysilicon, then device complexity decreases, but the ability to optimize feeding for each specific polysilicon type is reduced

Engineering Contradiction:
Improvefeeder system complexityVSAvoidpolysilicon type adaptability
Core Design Contradiction:
Device complexityVSAdaptability or versatility

Solution Approach 1:

The patent applies dynamics by making the feeder configuration changeable through interchangeable trays. The system can dynamically adapt its structure by replacing the granular tray with a chunk tray or vice versa, depending on which polysilicon type is being processed. This dynamic reconfiguration capability allows the single feeder to maintain optimized feeding performance for different polysilicon types while keeping the overall device complexity low.

Inventive Principle:
Principle #15Dynamics

3Reliability

If separate feeders are used for different polysilicon types, then feeding optimization for each type is improved, but the ease of operation decreases due to needing multiple devices

Engineering Contradiction:
Improveprocess parameter controlVSAvoidfeeder operation simplicity
Core Design Contradiction:
ReliabilityVSEase of operation

Solution Approach 1:

The patent applies merging by combining the functionality of multiple separate feeders into a single unified feeder system. Instead of operating multiple separate devices, the user works with one feeder that can accommodate different tray types. This merging maintains the process parameter control optimization for each polysilicon type while significantly improving ease of operation, as users only need to manage one device rather than multiple separate feeders.

Inventive Principle:
Principle #5Merging (Combining)

4Adaptability or versatility

If interchangeable trays are implemented, then versatility for different polysilicon types is improved, but the device complexity increases due to additional components

Engineering Contradiction:
Improvepolysilicon type flexibilityVSAvoidfeed assembly complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent applies segmentation by dividing the feeder into modular components: a base feeder unit and interchangeable trays (granular tray and chunk tray). This segmentation allows the system to achieve versatility through simple, standardized modules that can be easily swapped. The complexity is distributed across simple, replaceable components rather than being concentrated in a complex integrated system, making the overall device more manageable despite its multi-functionality.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system provides a flexible and efficient means to supply either granular or chunk polysilicon, ensuring consistent process parameters and increased supply security by accommodating different polysilicon sources.

Implementation Method 1

The magnetic pulse vibrator includes an electromagnetic energy source that vibrates one of either the granular tray or the chunk tray through the emission of electromagnetic energy.

Methodology Applied
Scientific EffectElectromagnetic energy: Electromagnetic Induction

Data Source

PatentEP4538429A1Systems for selectively feeding chunk polysilicon or granular polysilicon in a crystal growth chamber
Publication Date: 2025.04.16 GLOBALWAFERS CO LTD
  • EP4538429A1 patent drawingFigure 1
  • EP4538429A1 patent drawingFigure 2
  • EP4538429A1 patent drawingFigure 3A~3B

AI summary

A feed assembly supplies polysilicon to a growth chamber for growing a crystal ingot from a melt. An example system includes a housing having support rails for receiving one of a granular tray and a chunk tray and a feed material reservoir positioned above the support rails to selectively feed one of either the granular tray or the chunk tray. A valve mechanism and pulse vibrator are also disclosed.