Polysilicon Force Sensor Baseline Drift in Display Substrates
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Solution Overview
Problem
The existing display panels with force sensors suffer from baseline drifting due to non-elastic deformation in layers with small Young's modulus, leading to reduced detection accuracy of force magnitude.
Innovation Solution
A display substrate with a polysilicon force sensor layer, where a first layer with a higher Young's modulus than silicon oxide is placed under and a second layer with a higher Young's modulus is placed above the force sensor, preventing non-elastic deformation and baseline drifting.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If layers with silicon oxide material are used above and below the force sensor, then the manufacturing process is simple and material compatibility is good, but the Young's modulus is relatively small causing non-elastic deformation and baseline drifting
Solution Approach 1:
The patent changes the material parameter (Young's modulus) of the layers above and below the force sensor from silicon oxide to materials with higher Young's modulus (such as silicon nitride or silicon oxynitride). This parameter change prevents non-elastic deformation under external force, eliminating baseline drifting and improving detection accuracy without significantly complicating the manufacturing process.
Solution Approach 2:
The patent employs composite material structure by combining layers with different material properties. The force sensor layer is sandwiched between support layers made of materials with high Young's modulus, creating a composite structure that provides both mechanical stability and sensor functionality. This composite approach maintains ease of manufacture while solving the baseline drift problem.
2Adaptability or versatility
If external force is applied to the display panel, then force detection function is activated, but non-elastic deformation occurs in layers with small Young's modulus causing baseline drift
Solution Approach 1:
By changing the material parameter (Young's modulus) of the support layers to higher values, the patent ensures that these layers remain elastically deformable only, returning to their original state after force application. This prevents permanent deformation and baseline drift, thereby maintaining measurement precision while preserving force detection capability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the detection accuracy of force sensors by preventing deformation when not subjected to stress, thereby improving the reliability of force magnitude detection.
Implementation Method 1
When an external force is applied, both elastic deformation and non-elastic deformation may occur, in which an inelastic deformation will remain in the layer and cannot be restored
Implementation Method 2
a Young's modulus of at least one of the first layer and the second layer is larger than a Young's modulus of silicon oxide
Data Source
AI summary
The present disclosure provides a display substrate and a manufacturing method thereof, and a display panel. The display substrate has a display area and a peripheral area surrounding the display area, wherein a plurality of force sensors is provided in the peripheral area and the plurality of force sensors is made of polysilicon material, in a direction perpendicular to the display substrate, a first layer is provided directly under a layer where the plurality of force sensors is located, and a second layer is provided directly above the layer where the plurality of force sensors is located, a Young's modulus of at least one of the first layer and the second layer is larger than a Young's modulus of silicon oxide. The technical solution of the present disclosure can improve the detection accuracy of the force sensor with respect to a force.