Automated Brush and Nozzle System for Polysilicon Reactor Bell Cleaning

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Manual cleaning of polysilicon reactors is inefficient and lacks standardized automation, leading to inconsistent removal of silicon and contaminants from interior surfaces.

Innovation Solution

A system comprising a frame, actuating mechanism, brushes, and nozzles that allows for vertical and rotational movement within the reactor bell to scrub and rinse the interior surfaces with liquid, followed by gas drying, enhancing the cleaning process automation and efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If manual cleaning is used, then the cleaning process is simple to implement, but the cleaning efficiency and consistency are poor

Engineering Contradiction:
Improvecleaning efficiencyVSAvoidcleaning system complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The cleaning system performs automated cleaning operations without requiring manual intervention during the cleaning process. The actuating mechanism automatically positions and operates the brushes and nozzles, allowing the system to clean itself or the reactor bell autonomously, thereby improving productivity while managing complexity through automation.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The patent replaces manual mechanical cleaning operations with an automated mechanical system. The actuating mechanism, brushes, and nozzles form an automated mechanical cleaning system that substitutes human labor, improving cleaning efficiency and consistency while reducing manual effort.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Manufacturing precision

If automated cleaning system is implemented, then cleaning consistency and efficiency improve, but the device complexity increases

Engineering Contradiction:
Improvecleaning consistencyVSAvoidcleaning system complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The actuating mechanism provides dynamic positioning and movement capabilities, allowing the brushes and nozzles to move vertically and rotate to access different areas of the reactor bell interior. This dynamic operation ensures consistent cleaning coverage while managing system complexity through controlled motion.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The cleaning system integrates multiple functions into a single apparatus: brushing for mechanical scrubbing, nozzle spraying for liquid application, and actuating mechanisms for positioning. This multi-functionality improves cleaning consistency while consolidating operations into one system rather than multiple separate devices.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Reliability

If brushes and nozzles are used together, then contaminant removal effectiveness improves, but the device complexity increases

Engineering Contradiction:
Improvecontaminant removal effectivenessVSAvoidcleaning mechanism complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent combines mechanical brushing and liquid spraying functions into a single integrated cleaning system. The brushes and nozzles work together synergistically, with the actuating mechanism coordinating both components, to achieve more effective contaminant removal than either method alone, while managing complexity through integration.

Inventive Principle:
Principle #5Merging (Combining)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The system effectively automates the cleaning process, ensuring thorough removal of contaminants and debris, reducing manual effort, and improving reactor reflectivity, which in turn reduces energy consumption and enhances process efficiency.

Implementation Method 1

the nozzle configured to direct a flow of liquid against the interior surface of the reactor bell

Methodology Applied
Scientific EffectFluid flow:

Implementation Method 2

at least one brush connected to the actuating mechanism, the brush configured to contact the interior surface of the reactor bell

Methodology Applied
Scientific EffectMechanical abrasion: Abrasion

Data Source

PatentEP2726223B1Cleaning tool and method for a polysilicon reactor
Publication Date: 2015.06.10 MEMC ELECTRONIC MATERIALS SPA
  • EP2726223B1 patent drawingFigure 1
  • EP2726223B1 patent drawingFigure 2
  • EP2726223B1 patent drawingFigure 3

AI summary

Systems and methods are provided for cleaning an interior surface of a chemical vapor deposition reactor bell used in the production of polysilicon. In one method, the reactor bell is positioned atop a frame; a first actuator is operated such that the brush engages the interior surface of the reactor bell. A flow of liquid is directed from a nozzle against the interior surface of the reactor bell, and a second actuator is operated to rotate the brush.