Fluidized Bed Reactor Wall Deposition Control

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Solution Overview

Problem

Existing fluidized bed reactor processes for producing high-purity polycrystalline silicon face challenges with silicon deposition on reactor walls, leading to reduced heating efficiency, mechanical stress, and increased energy costs due to thermal insulation and blockages, which complicates continuous operation and purity maintenance.

Innovation Solution

A reactor design with two zones, where only dilution gas is introduced in the lower zone to fluidize silicon granules, and reaction gas is injected as vertically upward jets into the upper reaction zone, ensuring complete reaction before reaching the walls, thereby minimizing wall deposition and maintaining efficient heating.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If silicon containing compound is fed to fluidized bed for continuous production, then high-purity polycrystalline silicon granules can be produced, but silicon deposits on reactor wall forming thermal insulator layer that impairs heating function

Engineering Contradiction:
Improvecontinuous production of high-purity silicon granulesVSAvoidheating efficiency due to thermal insulator layer
Core Design Contradiction:
ProductivityVSLoss of energy

Solution Approach 1:

The reactor is divided into two distinct zones: a lower reaction zone where silicon-containing gas is introduced and reacts with silicon particles, and an upper fluidized bed zone where silicon granules are produced. This segmentation confines the deposition reaction to a specific region, preventing silicon layer formation on the entire reactor wall and maintaining heating efficiency in the fluidized bed zone.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A gas stream serving as an intermediary carrier is used to transport silicon-containing compounds from the reaction zone to the fluidized bed. This intermediary gas flow ensures complete reaction of the silicon-containing compound before it reaches the reactor wall, preventing direct deposition on the wall while maintaining continuous silicon granule production.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Productivity

If silicon containing compound reacts at hot particle surfaces, then elemental silicon deposits on particle surface leading to growth, but also reacts at hot reactor components causing wall deposition

Engineering Contradiction:
Improvesilicon granule growthVSAvoidwall deposition
Core Design Contradiction:
ProductivityVSObject-generated harmful factors

Solution Approach 1:

The reactor is designed with different functional zones having distinct gas flow characteristics: the lower reaction zone has high gas velocity and limited residence time to promote complete reaction, while the upper fluidized bed zone has controlled gas flow to facilitate silicon deposition on particles. This local differentiation ensures silicon grows on intended particles while preventing wall deposition.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The process maintains continuous operation by constantly introducing silicon-containing gas into the fluidized bed, ensuring uninterrupted silicon granule growth. The continuous gas flow prevents accumulation of unreacted silicon-containing compounds that could otherwise deposit on walls, while continuously producing high-purity silicon granules.

Inventive Principle:
Principle #20Continuity of useful action

3Duration of action of stationary object

If silicon layer deposits on wall, then limits maximum operating time, but mechanical stresses from thermal expansion difference can cause chipping or breaking

Engineering Contradiction:
Improveoperating timeVSAvoidwall integrity
Core Design Contradiction:
Duration of action of stationary objectVSStrength

Solution Approach 1:

By segmenting the reactor into reaction and fluidized bed zones, the invention confines silicon deposition to a controlled region, preventing widespread wall coverage. This maintains wall integrity and allows prolonged operation without the mechanical stress-induced chipping or breaking that would occur with uniform wall deposition.

Inventive Principle:
Principle #1Segmentation

4Ease of operation

If dilution gas is fed to fluidized bed, then reaction gas can be transported, but wall deposition still occurs on reactor components

Engineering Contradiction:
Improvegas transportVSAvoidwall deposition
Core Design Contradiction:
Ease of operationVSObject-generated harmful factors

Solution Approach 1:

The gas stream acts as an intermediary carrier that transports silicon-containing compounds from the reaction zone through the fluidized bed. By optimizing the composition and flow of this intermediary gas, complete reaction is achieved before the gas contacts the reactor wall, preventing deposition while maintaining effective gas transport.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly reduces wall deposition, allows for prolonged reactor operation with efficient heating, and produces high-purity silicon granules with desired grain size distribution and low dust content without additional treatment steps, reducing energy consumption and operational complexities.

Implementation Method 1

a silicon containing compound contained in the gas, generally silane SiH4 or halosilanes SiHxXy (Cl, Br, I, F), decomposes at the hot particle surfaces in a pyrolysis reaction with formation of elemental silicon

Methodology Applied
Scientific EffectPyrolysis: Pyrolysis

Implementation Method 2

The feeding of the silicon containing compound, by itself or mixed with dilution gas, is referred to below as the 'reaction gas.'... the silicon containing compound... decomposes at the hot particle surfaces in a pyrolysis reaction with formation of elemental silicon that deposits on the surface of the silicon particles

Methodology Applied
Scientific EffectGas phase deposition: Chemical Vapour Deposition

Implementation Method 3

the bed is fluidized by a gas... a bed of silicon particles is initially introduced, the bed is fluidized by a gas

Methodology Applied
Scientific EffectFluidization: Fluidisation

Implementation Method 4

heated by a suitable device to the temperature required for the deposition reaction... the fluidized bed is generally heated precisely by the wall

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS8722141B2Process for the continuous production of polycrystalline high-purity silicon granules
Publication Date: 2014.05.13 WACKER CHEMIE AG
  • US8722141B2 patent drawing
  • US8722141B2 patent drawing
  • US8722141B2 patent drawing

AI summary

High-purity polysilicon granules are prepared by depositing reaction gas on silicon granules in a fluidized bed reactor having:a reactor space comprising at least two zones lying one above the other, the lower zone weakly fluidized by introduction of a silicon-free gas into silicon granules in the lower zone by a plurality of individual dilution gas nozzles, and a second, reaction zone directly abutting the lower zone,the reaction zone heated via its outwardly bounding wall,introducing silicon-containing reaction gas as a vertical high speed gas jet into the reaction zone by reaction gas nozzle(s), forming local reaction gas jets surrounded by bubble-forming fluidized bed, gas decomposing leading to particle growth,wherein the reaction gas has fully or almost fully reacted to chemical equilibrium conversion before reaching the wall or bed surface.