Polysilicon Resistor Layout for Current Sense Accuracy

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Solution Overview

Problem

Current sensing in wireless power systems faces inaccuracies due to the piezoresistive effect in polysilicon resistors, which are subject to internal stresses during fabrication, leading to errors in high-accuracy environments, particularly at 1 amp of current where 1 milliamp corresponds to 0.1% error, consuming 20% of the 0.5% error margin.

Innovation Solution

The integrated circuit incorporates a current sense circuit with polysilicon resistors arranged symmetrically about an axis and at the same distance from the chip edge to minimize stress differential and resistance changes due to piezo resistivity, reducing errors without requiring post-fabrication calibration.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If polysilicon resistors are used in current sensing, then the device can be manufactured with standard CMOS processes, but the piezoresistive effect introduces measurement errors in high-accuracy environments

Engineering Contradiction:
ImprovemanufacturabilityVSAvoidcurrent sensing accuracy
Core Design Contradiction:
Ease of manufactureVSMeasurement precision

Solution Approach 1:

The patent applies asymmetry in reverse - it uses symmetry strategically. The polysilicon resistors are arranged symmetrically about a central axis and positioned at equal distances from the chip edge, creating a balanced stress distribution that minimizes piezoresistive effects. This symmetric arrangement ensures that stress differentials cancel out, improving measurement precision while maintaining standard CMOS manufacturability

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

The patent changes the physical arrangement parameters of the resistors - specifically their positions and orientations relative to the chip edges and to each other. By positioning resistors at specific symmetric locations and angles, the design exploits geometric parameter optimization to minimize stress-induced resistance changes, thereby improving current sensing accuracy without altering the polysilicon material or fabrication process

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If post-fabrication calibration is performed to correct resistor errors, then measurement precision improves, but device complexity and manufacturing cost increase

Engineering Contradiction:
Improvecurrent sensing accuracyVSAvoidcalibration requirement
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent performs preliminary action by designing the resistor layout to inherently minimize piezoresistive effects before fabrication. The symmetric arrangement about the central axis and equal positioning from chip edges are built into the mask design, pre-compensating for stress effects. This eliminates the need for post-fabrication calibration, reducing device complexity and manufacturing cost while maintaining high measurement precision

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration achieves accuracy within 0.5% across a wide range of currents, minimizing the impact of piezoresistive effects and maintaining precision in current measurement.

Implementation Method 1

Current sensing in wireless power systems faces inaccuracies due to the piezoresistive effect in polysilicon resistors, which are subject to internal stresses during fabrication

Methodology Applied
Scientific EffectPiezoresistive effect: Piezoresistive Effect

Data Source

PatentUS12092664B2Layout for integrated resistor with current sense functionality
Publication Date: 2024.09.17 AVAGO TECHNOLOGIES INTERNATIONAL SALES PTE LTD
  • US12092664B2 patent drawing
  • US12092664B2 patent drawing
  • US12092664B2 patent drawing

AI summary

One or more layout techniques may be used to balance a current sense circuit. The current sense circuit may include upstairs resistors for an amplifier which are formed of polysilicon material. The upstairs resistors may be arranged symmetrically about one or more stress gradients for improving an accuracy of the current sense circuit. The stress gradients may include stress gradients about an axis and stress gradients from a die edge.