Polysiloxane Formulation for Thick Cured Films
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Solution Overview
Problem
Existing polysiloxane formulations struggle to produce thick, transparent, heat-resistant cured films with high aspect ratios and rectangularity, while also minimizing adhesion to photomasks.
Innovation Solution
A polysiloxane formulation comprising a specific combination of repeating units represented by formulas (Ia) and (Ib), along with a polymerization initiator, is used to form a cured film. This formulation includes a polysiloxane Pab or a mixture of polysiloxanes Pa and Pb, which are applied to a substrate and heated to cure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If a polysiloxane formulation is used to form a cured film, then heat resistance is improved, but film thickness and transmissivity are insufficient
Solution Approach 1:
The patent uses a composite polysiloxane formulation containing multiple types of polysiloxane (cyclic polysiloxane with silanol groups, linear polysiloxane with silanol groups, and polysiloxane with photopolymerizable groups) combined with specific additives. This composite approach allows the cured film to achieve both high heat resistance (withstanding 400°C or higher) and sufficient film thickness (5 μm or more) while maintaining transmissivity, resolving the contradiction between heat resistance and film thickness/transmissivity
2Shape
If the formulation is designed for high aspect ratio structures, then rectangularity is improved, but adhesion to photomask increases
Solution Approach 1:
The patent carefully controls the molecular weight and structural parameters of the polysiloxane components. By using cyclic polysiloxane with 3-10 siloxane units and controlling the molecular weight of linear polysiloxane to 1,000-10,000, the formulation achieves high rectangularity (0.95 or higher) while reducing adhesion to photomasks, preventing pattern distortion and enabling easy mask removal
3Volume of moving object
If the formulation aims to form thick cured films, then film thickness is improved, but transmissivity and heat resistance deteriorate
Solution Approach 1:
The patent employs different polysiloxane components with specific functions at different levels of the film structure. Cyclic polysiloxane provides crosslinking for heat resistance, linear polysiloxane contributes to film thickness, and polysiloxane with photopolymerizable groups ensures curing and transmissivity. This local quality differentiation allows the thick film (5 μm or more) to maintain both transmissivity (70% or higher) and heat resistance simultaneously
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The formulation achieves the formation of thick, transparent, heat-resistant cured films with high aspect ratios and rectangularity, while suppressing adhesion to photomasks, thus addressing multiple performance criteria simultaneously.
Implementation Method 1
by means of using a photopolymerizable functional group as the functional group of polysiloxane
Implementation Method 2
a coating film is heated at a high temperature to rapidly proceed with the condensation reaction of the silanol group in polysiloxane
Data Source
AI summary
A cured film forming formulation comprising a polysiloxane having a specific structure, and a polymerization initiator. A method for manufacturing a cured film, which comprises applying the cured film forming formulation above a substrate to form a coating film, and heating the coating film.