POP Package Structure with TIV Interconnects for Delamination Control

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Solution Overview

Problem

Current semiconductor packaging technologies face challenges in efficiently connecting and integrating multiple semiconductor dies within a package structure, particularly in achieving reliable electrical connections and minimizing delamination stresses, which can impact the performance and reliability of Package-on-Package (POP) structures.

Innovation Solution

The method involves using through insulator vias (TIVs) and a debond layer on a carrier, followed by encapsulation and redistribution layers, with solder joints formed between packages, and an underfill material to manage stress and ensure electrical connectivity, while allowing for easy separation and assembly of package components.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If multiple semiconductor dies are connected and integrated within a package structure, then electrical connectivity and functionality are improved, but delamination stresses and reliability issues increase

Engineering Contradiction:
Improveelectrical connection reliabilityVSAvoidresistance to delamination stress
Core Design Contradiction:
ReliabilityVSStrength

Solution Approach 1:

The package structure is divided into multiple separate semiconductor dies that are individually processed and then integrated through wafer-level packaging. Each die remains as a distinct functional unit, allowing independent optimization and reducing stress concentration that would occur in monolithic structures.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Multiple semiconductor dies are stacked and integrated within a single package structure in a nested arrangement. The first and second semiconductor dies are positioned at different vertical levels, with interconnect structures bridging between them, creating a compact three-dimensional integration that improves electrical connectivity while managing mechanical stresses through the layered architecture.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Productivity

If wafer-level packaging is used to process and package multiple dies, then manufacturing efficiency and productivity are improved, but process complexity and integration difficulty increase

Engineering Contradiction:
Improvemanufacturing efficiencyVSAvoidintegration complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

Multiple semiconductor dies are processed and packaged simultaneously at the wafer level rather than individually. The first and second semiconductor dies undergo fabrication, testing, and packaging operations as integrated circuits on the same wafer substrate, consolidating multiple manufacturing steps into a unified process flow that dramatically improves productivity.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

Semiconductor dies are processed, tested, and prepared for packaging while still on the wafer substrate before being separated and integrated into the final package structure. This preliminary processing and testing at the wafer level allows for early defect detection and ensures that only functional dies proceed to the integration stage, simplifying the overall manufacturing process.

Inventive Principle:
Principle #10Preliminary action

Data Source

PatentUS20240371840A1Package structure and manufacturing method thereof
Publication Date: 2024.11.07 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20240371840A1 patent drawing
  • US20240371840A1 patent drawing
  • US20240371840A1 patent drawing

AI summary

A package structure and the manufacturing method thereof are provided. The package structure includes a first package including at least one first semiconductor die encapsulated in an insulating encapsulation and through insulator vias electrically connected to the at least one first semiconductor die, a second package including at least one second semiconductor die and conductive pads electrically connected to the at least one second semiconductor die, and solder joints located between the first package and the second package. The through insulator vias are encapsulated in the insulating encapsulation. The first package and the second package are electrically connected through the solder joints. A maximum size of the solder joints is greater than a maximum size of the through insulator vias measuring along a horizontal direction, and is greater than or substantially equal to a maximum size of the conductive pads measuring along the horizontal direction.