Porous Carbon Electron Beam Detection via Cathodoluminescence

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Solution Overview

Problem

Conventional devices for detecting electron beams have low accuracy and complex structures, necessitating a device and method that can provide simple operation with high accuracy for electron beam detection.

Innovation Solution

A device comprising a porous carbon material layer, a substrate, and a Faraday cup, where the porous carbon material layer with a super-aligned carbon nanotube array is used to absorb electrons, allowing for high detection accuracy by creating a two-dimensional scanning mechanism that visualizes the electron beam through color differences on an image display.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If conventional devices are used for detecting electron beam, then the structure is complex, but the detection accuracy is low

Engineering Contradiction:
Improvedetection accuracyVSAvoidstructure complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent employs a porous carbon material layer with a super-aligned carbon nanotube array as the detection medium. The porous structure with controlled pore sizes (5-50 micrometers) enables high electron absorption efficiency while maintaining a simple overall device architecture. The carbon nanotubes provide both the porous structure and the electron interaction capability, eliminating the need for complex detection mechanisms.

Inventive Principle:
Principle #31Porous materials

Solution Approach 2:

The device uses a composite structure combining porous carbon material with a Faraday cup. The carbon material layer is positioned above the Faraday cup to form an integrated detection system where the carbon layer absorbs electrons and the Faraday cup collects charged particles, achieving high detection accuracy through material composition rather than structural complexity.

Inventive Principle:
Principle #40Composite materials

2Measurement precision

If conventional devices are used for detecting electron beam, then the operation is complex, but the detection accuracy is low

Engineering Contradiction:
Improvedetection accuracyVSAvoidoperation simplicity
Core Design Contradiction:
Measurement precisionVSEase of operation

Solution Approach 1:

The porous carbon material layer automatically absorbs electrons from the electron beam without requiring complex operational procedures. The material's inherent electron absorption capability (nearly 100% efficiency) allows the device to function through passive electron interaction, eliminating the need for complex control mechanisms or multi-step operational procedures.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The device utilizes color changes on the image display to indicate electron beam detection results. Different regions of the carbon material layer exhibit different colors based on electron absorption, providing intuitive visual feedback that simplifies operation and interpretation of detection results.

Inventive Principle:
Principle #32Color changes

3Reliability

If porous carbon material layer is used to absorb electrons, then the electron absorption efficiency is high, but the device structure becomes more complex

Engineering Contradiction:
Improveelectron absorption efficiencyVSAvoiddevice structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The porous carbon material layer serves multiple functions simultaneously: it acts as the electron absorption medium, provides the porous structure for high absorption efficiency, and integrates with the Faraday cup to form a complete detection device. This multi-functionality reduces the need for separate components, maintaining structural simplicity while achieving high electron absorption efficiency.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The device achieves nearly 100% electron absorption, enabling high accuracy in detecting the shape and size of electron beams with a simple operation, as the porous carbon material layer acts as an electronic blackbody, providing clear color differences for easy visualization.

Implementation Method 1

the porous carbon material layer with a super-aligned carbon nanotube array is used to absorb electrons

Methodology Applied
Scientific EffectElectron absorption: Absorption (EM radiation)

Implementation Method 2

visualizes the electron beam through color differences on an image display

Methodology Applied
Scientific EffectCathodoluminescence: Cathodoluminescence

Data Source

PatentUS11320547B1Device and method for detecting electron beam
Publication Date: 2022.05.03 HON HAI PRECISION INDUSTRY CO LTD
  • US11320547B1 patent drawing
  • US11320547B1 patent drawing
  • US11320547B1 patent drawing

AI summary

An device for detecting electron beam comprises a porous carbon material layer, a Faraday cup and an image display. The porous carbon material layer comprises a plurality of carbon material particles and a first through hole. A plurality of micro gaps exist between the plurality of carbon material particles. A cross-sectional area of the first through hole is less than or equal to a cross-sectional area of the electron beam. The Faraday cup is under the porous carbon material layer and comprises an opening. The opening and the first through hole penetrate with each other. The image display is electrically connected to the porous carbon material layer and configured to form an image with different colors according to charge generated in the porous carbon material layer. A method for detecting electron beam using the device for detecting electron beam is also provided.