Porous Ceramic Composite Coating for Corrosion-Resistant Components
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Solution Overview
Problem
Existing coatings for components in processing systems, such as semiconductor wafer manufacturing equipment, are either costly to produce or lack uniformity and durability in corrosive environments.
Innovation Solution
A resistant coating comprising a porous ceramic layer with a polymer sealant and dispersed resistant particles, applied using methods like physical vapor deposition or plasma electrolytic oxidation, which infiltrates the pores of the ceramic layer to enhance corrosion resistance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a porous ceramic coating is applied to protect components in corrosive environments, then corrosion resistance is improved, but the coating lacks uniformity and durability
Solution Approach 1:
The patent applies composite materials by combining porous ceramic coating with polymer sealant and resistant particles to create a multi-component coating system. The polymer sealant penetrates the porous ceramic structure to provide uniform distribution and binding, while resistant particles are dispersed within the polymer matrix to enhance durability and corrosion resistance, resolving the contradiction between corrosion protection and coating uniformity
Solution Approach 2:
The patent utilizes porous ceramic material as the base coating layer that provides corrosion resistance through its porous structure. The porosity allows polymer sealant to penetrate and fill the pores, creating a uniform composite structure that maintains the ceramic's corrosion protection while improving overall coating durability and uniformity
2Reliability
If existing resistant coatings are used to protect components, then some level of protection is provided, but the coatings are costly to produce
Solution Approach 1:
The patent creates a cost-effective composite coating by combining relatively inexpensive polymer sealant with resistant particles in a slurry formulation that can be applied to porous ceramic coatings. This composite approach provides enhanced protection capability while being more economical than traditional single-material resistant coatings, addressing the cost issue while maintaining reliability
3Duration of action of stationary object
If a coating is applied to protect against corrosive environments, then component durability is improved, but coating breakdown and contamination occur over time
Solution Approach 1:
The patent employs composite materials where resistant particles are dispersed within the polymer sealant matrix. This composite structure enhances coating integrity by providing reinforcement that prevents coating breakdown, while the polymer sealant ensures uniform adhesion to the porous ceramic substrate, thereby maintaining reliability over extended durations in corrosive environments
Solution Approach 2:
The patent applies local quality by dispersing resistant particles throughout the polymer sealant matrix, creating localized reinforcement zones. This distributed particle reinforcement provides uniform enhancement of coating integrity across the entire coating, preventing localized breakdown and maintaining reliability over time
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The coating provides improved protection against corrosive environments by combining the durability of ceramic materials with the sealing and reinforcing properties of polymer sealants and resistant particles, reducing the frequency and severity of coating breakdown and contamination.
Implementation Method 1
disposing a polymer sealant precursor comprising a plurality of particles within one or more pores of the porous ceramic coating
Implementation Method 2
curing the polymer sealant precursor to generate a polymer sealant
Data Source
AI summary
A component includes a body and a coating deposited on a surface of the body. The coating includes a porous ceramic. The coating further includes a polymer sealant. The coating further includes a plurality of particles disposed within the polymer sealant.