Porous Ceramic Body Shrinkage Control via Burn-off Particles
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Solution Overview
Problem
Existing methods for manufacturing ceramic porous bodies do not consider the rate of shrinkage during heating, leading to potential displacement of the porous body from through holes when in use.
Innovation Solution
A ceramic mixture paste comprising oxide ceramic particles, burn-off particles that are burned off at a lower temperature, and a firing aid that melts at a lower temperature, with a volume ratio of burn-off particles to oxide ceramic particles ranging from more than 0% to 20%, is used to reduce shrinkage and maintain porosity, ensuring the porous body remains securely in place.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional methods are used to manufacture ceramic porous bodies without considering shrinkage rate, then the manufacturing process is simple, but the porous body may fall off from through holes due to excessive shrinkage during heating
Solution Approach 1:
The patent applies parameter changes by carefully controlling the volume ratio of burn-off particles to oxide ceramic particles within 0-20%, and adjusting the firing aid content to 1-10 parts by mass per 100 parts of oxide ceramic particles. These parameter optimizations reduce the shrinkage rate to 1% or less while maintaining manufacturing feasibility, thus improving position stability without excessive complexity
Solution Approach 2:
The patent uses composite materials by combining oxide ceramic particles, burn-off particles, and firing aids in specific proportions. This composite formulation creates a ceramic mixture paste that achieves controlled shrinkage behavior during firing, preventing the porous body from falling off while maintaining structural integrity and porosity
2Manufacturing precision
If the shrinkage rate is reduced to prevent porous body displacement, then position stability is improved, but the manufacturing process becomes more complex
Solution Approach 1:
The patent achieves precise shrinkage control (1% or less) by optimizing parameters including the volume ratio of burn-off particles to oxide ceramic particles (0-20%) and the mass ratio of firing aid to oxide ceramic particles (1-10%). These parameter settings enable accurate dimensional control while maintaining relatively simple manufacturing procedures
Solution Approach 2:
The patent applies preliminary action by pre-mixing oxide ceramic particles, burn-off particles, and firing aids in predetermined ratios before forming. This preliminary preparation ensures that the ceramic mixture paste has the correct composition for controlled shrinkage during firing, simplifying the overall manufacturing process while achieving high precision
3Stability of the object's composition
If burn-off particles are added to reduce shrinkage, then shrinkage rate decreases, but the composition complexity increases
Solution Approach 1:
The patent maintains compositional stability by controlling the volume ratio of burn-off particles to oxide ceramic particles within 0-20%. This parameter range ensures that burn-off particles effectively reduce shrinkage through their combustion and volume expansion, while preventing excessive composition complexity that would complicate the manufacturing process
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces the shrinkage rate to 1% or less, preventing the porous body from falling off through holes and maintaining porosity between 30% and 43%, thereby ensuring stable operation and efficient gas passage for cooling substrates in electrostatic chucks.
Implementation Method 1
burn-off particles, and a firing aid. The burn-off particles are burned off at a temperature lower than the firing temperature of the oxide ceramic particles
Implementation Method 2
The firing aid melts at a temperature lower than the firing temperature
Implementation Method 3
heating the ceramic mixture paste to a predetermined temperature to fire the oxide ceramic particles and burn off the burn-off particles
Data Source
AI summary
A ceramic mixture paste includes oxide ceramic particles, burn-off particles, and a firing aid. The burn-off particles are burned off at a temperature lower than the firing temperature of the oxide ceramic particles. The firing aid melts at a temperature lower than the firing temperature. The ratio of the volume of the burn-off particles to the volume of the oxide ceramic particles is more than 0% and less than or equal to 20%.