Porous Ceramic Chamber Coating with Colloidal Pore Filling
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Solution Overview
Problem
Conventional porous protective coatings in processing chambers are sensitive to harsh environments, such as vacuum conditions and elevated temperatures, leading to reduced protection, increased difficulty in generating fluid seals, and lower dielectric breakdown resistance.
Innovation Solution
A method involving the formation of a porous ceramic layer on chamber components, followed by applying a colloidal suspension to fill the pores of the layer, which includes ceramic materials or metal oxides, and subsequent drying to set the material within the pores, enhancing the coating's resilience and sealing capabilities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a porous protective coating is applied to chamber components, then protection against corrosive gases is improved, but resistance to vacuum conditions and elevated temperatures deteriorates
Solution Approach 1:
The patent utilizes a porous anodized coating structure that provides corrosion protection while maintaining compatibility with vacuum and temperature conditions. The porous structure allows for subsequent filling operations to enhance high-temperature and vacuum resistance
Solution Approach 2:
The patent creates a composite structure by filling the porous coating with colloidal suspension material, combining the corrosion protection of the anodized layer with the thermal and vacuum stability of the fill material, resulting in a multi-functional protective system
2Object-affected harmful factors
If a porous protective coating is applied to chamber components, then protection against corrosive gases is improved, but sealing performance deteriorates
Solution Approach 1:
The porous anodized coating provides corrosion protection while the controlled porosity allows for fill material insertion that subsequently improves sealing characteristics
Solution Approach 2:
The composite structure of porous coating plus fill material creates a system that combines corrosion resistance with improved sealing capability, as the fill material plugs the pores to prevent gas leakage while maintaining the protective outer layer
3Object-affected harmful factors
If a porous protective coating is applied to chamber components, then protection against corrosive gases is improved, but dielectric breakdown resistance deteriorates
Solution Approach 1:
The porous anodized coating structure provides corrosion protection while the pores can be filled with dielectric material to restore and enhance electrical insulation properties
Solution Approach 2:
The composite structure combines the corrosion-resistant porous coating with a dielectric fill material, creating a system that simultaneously provides chemical protection and electrical insulation by filling the conductive pores with insulating material
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The filled porous coating provides improved protection against harsh environments, increased resistance to elevated temperatures and vacuum conditions, enhanced dielectric breakdown resistance, and improved sealing performance compared to unfilled coatings.
Implementation Method 1
applying a colloidal suspension to the porous ceramic layer to fill pores of the porous ceramic layer
Implementation Method 2
applying a colloidal suspension to the porous ceramic layer to fill pores
Data Source
AI summary
A method includes forming a porous ceramic coating on a component of a processing chamber. The method further includes applying a colloidal suspension to the porous ceramic coating to fill pores of the porous ceramic coating. The method further includes drying the component.