Porous Ion Source Target Structure for Higher Beam Current
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Solution Overview
Problem
Existing ion implantation targets have limited thermal efficiency and reaction surface area, leading to suboptimal ion beam currents and increased cathode erosion rates in ion implanter systems.
Innovation Solution
A target with a target body that has an effective density of less than 0.5 in the region around the central bore, featuring a cylindrical shape with circular grooves and a lattice structure, which enhances thermal characteristics and reaction surface area.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If a traditional solid target is used, then the target structure is simple and easy to manufacture, but the reaction surface area is limited and thermal efficiency is poor
Solution Approach 1:
The patent applies a porous target body structure with controlled porosity (30-70%) to dramatically increase the reaction surface area available for ion bombardment. The porous architecture provides numerous internal surfaces that can interact with the ion beam, thereby enhancing the effective reaction area without proportionally increasing the external dimensions of the target.
Solution Approach 2:
The invention transitions from a conventional two-dimensional surface target to a three-dimensional porous structure with interconnected pores throughout the target body. This dimensional transformation allows ions to penetrate and react throughout the volume of the target rather than仅限于 the surface, effectively multiplying the reaction surface area.
2Productivity
If a traditional solid target is used, then the manufacturing process is simple, but the thermal efficiency is limited leading to suboptimal ion beam currents
Solution Approach 1:
The porous structure provides enhanced thermal management by creating numerous internal pathways for heat dissipation. The high surface-area-to-volume ratio of the porous network facilitates more efficient heat transfer from the ion bombardment zones to the target backing, preventing excessive heat accumulation and maintaining optimal operating temperatures for sustained high ion beam currents.
Solution Approach 2:
The patent incorporates a fluid cooling system that flows through channels within the target structure. This hydraulic cooling mechanism actively removes heat from the target body, improving thermal efficiency and enabling the target to sustain higher ion beam currents without thermal damage or excessive heat loss.
3Reliability
If a traditional target design is used, then the cathode erosion rate is high, but the target design is simple
Solution Approach 1:
The porous target structure distributes the ion bombardment load across numerous internal surfaces rather than concentrating it on a single dense surface. This distribution effect reduces the localized stress and erosion on any single area, thereby decreasing the overall cathode erosion rate and extending the lifetime of the ion source components.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The improved target design results in higher reaction rates, increased ion beam currents, and reduced cathode erosion rates, thereby enhancing the performance and productivity of ion implantation systems.
Implementation Method 1
The target body has an effective density of less than 0.5 in a region around the central bore... enhances thermal characteristics
Implementation Method 2
The target is used as a source of ions, which are created by energetic sputtering of the target
Data Source
AI summary
A target body can define a central bore along a central axis of the target body. The central axis extends between two planar ends of the target body. The target body has an effective density of less than 0.5 in region around the central bore. The target body can be a metal-doped ceramic material including AlN doped with aluminum or a homogenous ceramic material including AlN or Al2O3 and may be fabricated using additive manufacturing.