Porous Optical Membrane Structure for Pressure-Balanced EUV Lithography
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Solution Overview
Problem
Conventional optical membranes in EUV lithography processes are prone to deformation or breakage due to pressure imbalances, which can affect the integrity of the exposure pattern.
Innovation Solution
The optical structure incorporates a porous membrane with randomly arranged pores and a border portion to support the membrane, preventing pressure imbalances and reducing the impact of scattered light.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a hermetically sealed optical membrane structure is used, then the membrane is protected from contamination, but pressure imbalances cause the membrane to deform or break
Solution Approach 1:
The patent applies porous materials by transitioning from a hermetically sealed membrane to a porous membrane structure. The porous membrane allows pressure equalization between both sides of the membrane while maintaining its protective function, thereby preventing deformation and breakage caused by pressure imbalances. The pores enable gas or liquid passage to balance pressure without compromising the membrane's structural integrity or protective capability.
2Reliability
If a porous membrane with randomly arranged pores is used, then pressure imbalances are prevented, but manufacturing complexity increases
Solution Approach 1:
The patent applies parameter changes by modifying the physical and chemical parameters of the membrane material to achieve porosity. Through controlling parameters such as pore size, pore distribution, and material composition during the manufacturing process, the membrane gains pressure-balancing capability while maintaining manufacturability. The random arrangement of pores with controlled parameters enables pressure equalization without requiring overly complex fabrication procedures.
3Illumination intensity
If the membrane is made thinner to reduce scattering, then light transmission improves, but the membrane becomes more susceptible to deformation and breakage
Solution Approach 1:
The patent applies composite materials by combining the porous membrane structure with a support structure to create a composite system. The porous membrane provides excellent light transmission with reduced scattering, while the integrated support structure reinforces the membrane, preventing deformation and breakage. This composite approach allows the membrane to be thin for optimal light transmission while gaining mechanical strength from the support structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The porous membrane structure prevents deformation and breakage, ensuring accurate light transmission and maintaining the integrity of the exposure pattern.
Implementation Method 1
The porous membrane may include at least one light-transmissive membrane layer
Data Source
AI summary
An optical structure includes a porous membrane and a border portion. The porous membrane includes at least one light-transmissive membrane layer and includes a plurality of pores that is randomly arranged in the membrane layer. The border portion is positioned at a bottom edge of the porous membrane to support the porous membrane.