Porous Suction Table Structure for Uniform Pressurization

Resolve Bottlenecks,
Find Innovative SolutionsGenerate Solutions

Solution Overview

Problem

Existing suction-attachment table configurations suffer from pressure unevenness during pressurization, reducing processing accuracy, and also experience suction-attachment unevenness, leading to inadequate object holding.

Innovation Solution

A pressurizing suction-attachment table with a porous body, an elastic member, and a frame body that supports the porous body via the elastic member, forming an aspiration space and allowing uniform reactive force distribution during pressurization.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a porous plate is arranged on a flat glass plate to suppress pressure unevenness, then pressure distribution is improved, but suction-attachment unevenness occurs at the outer periphery portion

Engineering Contradiction:

Improvepressure distributionVSAvoidsuction-attachment uniformity

Core Design Contradiction:

Manufacturing precisionVSReliability

Solution Approach 1:

The suction-attachment table is divided into multiple independent porous bodies arranged in an array, each capable of independent aspiration control. This segmentation allows uniform pressure distribution across the entire surface while maintaining consistent suction-attachment force at both central and peripheral regions, resolving the contradiction between pressure uniformity and suction-attachment uniformity.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Each porous body is designed with specific local properties including controlled pore sizes (50 μm or less) and surface roughness (Ra 12.5 or less) to ensure uniform aspiration characteristics. The local quality of each porous body is optimized to prevent suction-attachment unevenness at the outer periphery while maintaining overall pressure distribution.

Inventive Principle:

Principle #3Local quality

2Device complexity

If aspiration is performed from a side surface nozzle attached to the porous plate, then device structure is simplified, but suction-attachment force becomes higher at the outer periphery portion

Engineering Contradiction:

Improveaspiration structureVSAvoidsuction-attachment uniformity

Core Design Contradiction:

Device complexityVSReliability

Solution Approach 1:

Instead of attaching the aspiration source to the side surface as in conventional designs, the invention inverts the aspiration approach by creating aspiration spaces between the porous bodies and the frame body. This allows uniform aspiration force to be applied from the base side, preventing excessive suction-attachment at the outer periphery while maintaining structural simplicity.

Inventive Principle:

Principle #13The other way round (Inversion)

3Reliability

If protrusions are provided under the object on the suction-attachment surface, then object holding is improved, but pressure unevenness is generated during pressurization

Engineering Contradiction:

Improveobject holdingVSAvoidpressurization accuracy

Core Design Contradiction:

ReliabilityVSManufacturing precision

Solution Approach 1:

The invention extracts and removes the protrusions from the suction-attachment surface that cause pressure unevenness during pressurization. By eliminating these protrusions while maintaining the porous body structure with controlled pore sizes and surface roughness, the system achieves both reliable object holding through uniform suction-attachment and accurate pressurization without pressure concentration points.

Inventive Principle:

Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables the object to be held in a state suitable for pressurization, ensuring uniform pressure distribution and improved processing accuracy by minimizing suction-attachment unevenness.

Implementation Method 1

an elastic member directly or indirectly provided to the porous body... when the elastic member is elastically deformed due to pressurization of the object placed on the suction-attachment surface onto the suction-attachment surface

Methodology Applied

Scientific EffectElastic deformation: Elasticity

Implementation Method 2

an aspirator capable of aspirating the aspiration space to cause the object to be suction-attached to the suction-attachment surface

Methodology Applied

Scientific EffectAspiration: Suction

Data Source

PatentUS12318879B2Pressurizing suction-attachment table and pressurizing device equipped with the same

Publication Date: 2025.06.03 KANADEVIA CORP

AI summary

A pressurizing suction-attachment table comprises a porous body having a suction-attachment surface on which an object can be placed, an elastic member provided to the porous body, and a frame body supporting the porous body via the elastic member. The pressurizing suction-attachment table comprises an aspirator capable of aspirating an aspiration space formed between the porous body and the frame body to cause the object to be suction-attached to the suction-attachment surface. The porous body includes an opposite surface positioned on a side opposite to the suction-attachment surface. The frame body includes a receiving surface for receiving the opposite surface when the elastic member is elastically deformed due to pressurizing the object on the suction-attachment surface thereto. The pressurizing suction-attachment table is configured such that, when the opposite surface is received by the receiving surface, the porous body applies a uniform reactive force to the object being pressurized.