Portable Wireless Sensor for Semiconductor Fabrication Monitoring
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Solution Overview
Problem
Existing semiconductor fabrication sensors are limited in measuring key process parameters, are often wired, and difficult to disassemble or integrate with additional functionalities, restricting their capability to monitor multiple parameters simultaneously.
Innovation Solution
A portable wireless sensor system that includes multiple sensors to measure different fabrication process parameters, a signal converter to digitize analog data, and a wireless transceiver to transmit modulated data, allowing for integrated, multi-functional monitoring and real-time data analysis.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If wired sensors are used in semiconductor fabrication, then reliable data transmission is achieved, but ease of disassembly and portability deteriorate
Solution Approach 1:
The patent replaces wired mechanical connections with wireless communication technology. The sensor system uses wireless transceivers to transmit data without physical cables, eliminating the mechanical constraints that prevent easy disassembly while maintaining reliable data transmission through wireless protocols.
2Adaptability or versatility
If single-parameter sensors are used, then device complexity is reduced, but adaptability to measure multiple parameters deteriorates
Solution Approach 1:
The patent implements a universal sensor platform where a single sensor device can measure multiple fabrication parameters simultaneously. The system integrates multiple sensing capabilities (temperature, pressure, flow, etc.) into one portable unit with wireless communication, allowing the same device to monitor various process parameters without requiring separate specialized sensors for each parameter.
3Adaptability or versatility
If vendor-designed fabrication tools are used, then manufacturing precision is maintained, but adaptability to measure key process parameters deteriorates
Solution Approach 1:
The patent introduces an intermediary portable wireless sensor system that interfaces between the existing vendor-designed fabrication tools and the measurement requirements. These external sensors can be positioned near or on the fabrication tools to capture additional key process parameters without modifying the original tool design, thereby maintaining manufacturing precision while expanding measurement capabilities.
Data Source
AI summary
The present disclosure provides an apparatus for fabricating a semiconductor device. The apparatus includes a portable device. The portable device includes first and second sensors that respectively measure first and second fabrication process parameters. The first fabrication process parameter is different from the second fabrication process parameter. The portable device also includes a wireless transceiver that is coupled to the first and second sensors. The wireless transceiver receives the first and second fabrication process parameters and transmits wireless signals containing the first and second fabrication process parameters.