Portal Positioning Device with Force Sensor for Lateral Error Compensation

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Solution Overview

Problem

Positioning devices in portal construction face challenges in maintaining precise positioning accuracy when exerting significant forces on substrates that are not perfectly horizontal, leading to unacceptable lateral forces and misalignment of components during processes like thermocompression bonding.

Innovation Solution

A positioning device equipped with a multi-component force sensor to detect and correct lateral process forces, allowing the tool to tilt in accordance with the substrate's inclination, ensuring perpendicular alignment and minimizing lateral forces without prior knowledge of the tilt, utilizing a low-friction joint like a ball joint with an air bearing for compensation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Force

If significant process forces are exerted on a tilted substrate, then the bonding process can be performed, but lateral forces cause misalignment and positioning errors

Engineering Contradiction:
Improveprocess forceVSAvoidpositioning accuracy
Core Design Contradiction:
ForceVSManufacturing precision

Solution Approach 1:

A multi-component force sensor measures lateral process force components in real-time, and the control system uses this feedback to calculate and apply position corrections to the tool, dynamically compensating for substrate tilt effects during the bonding process

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The system changes the tool's position parameters based on measured lateral forces, calculating corrected target positions that account for substrate tilt and adjusting the tool location accordingly to maintain perpendicular alignment

Inventive Principle:
Principle #35Parameter changes

2Adaptability or versatility

If the substrate is not precisely horizontally aligned, then placement flexibility is improved, but lateral forces cause component misalignment

Engineering Contradiction:
Improvesubstrate alignment flexibilityVSAvoidcomponent alignment
Core Design Contradiction:
Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The force sensor provides real-time feedback on lateral forces generated by substrate tilt, enabling the control system to dynamically adjust tool position and maintain component alignment despite variations in substrate horizontal alignment

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The system transitions from a static positioning approach to a dynamic compensation approach, where tool position is continuously adjusted based on real-time force measurements to maintain alignment with the tilted substrate

Inventive Principle:
Principle #15Dynamics

3Area of stationary object

If a portal-type positioning device is used, then large workspace is achieved, but deformation under load causes positioning offset

Engineering Contradiction:
ImproveworkspaceVSAvoidtool position accuracy
Core Design Contradiction:
Area of stationary objectVSManufacturing precision

Solution Approach 1:

The force sensor detects lateral forces that cause portal device deformation, and the control system compensates for the resulting positioning offset by calculating corrected target positions based on the measured force components

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Achieves precise positioning and minimizes lateral forces to sub-millimeter levels, maintaining component alignment and ensuring accurate placement even with slight substrate tilts, as demonstrated by reducing lateral forces from 5 N to 0.05 N during thermocompression bonding.

Implementation Method 1

A low-friction ball joint, for example thanks to an air bearing, is well suited for this purpose.

Methodology Applied
Scientific EffectAir bearing: Air Lubrication

Data Source

PatentEP3083159B1Positioning device
Publication Date: 2020.07.08 ETEL SA
  • EP3083159B1 patent drawingFigure 1~2
  • EP3083159B1 patent drawingFigure 3(a)~5

AI summary

Disclosed is a positioning device for positioning a tool (2) in a reference position (Xref) on an X-Y plane on a flat substrate (3), said tool (2) exerting a process force (F) on the substrate (3) perpendicular to the substrate (3), in the axial direction (Z) of the tool (2). The tool (2) is equipped with a multi-component force sensor (5) for measuring undesired process force components (Fx) in the lateral direction (X, Y). The reference position (Xref) of the tool (2) can be corrected by the positioning device in such a way that the lateral process force components (Fx) are minimized.