Position-Aware Terminal Control for Semiconductor Tool Modules
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Solution Overview
Problem
In semiconductor manufacturing, operators on one side of the apparatus may inadvertently control modules on the other side, leading to safety risks due to lack of awareness of operators' presence, with components or liquids potentially coming into contact with them.
Innovation Solution
A control device with terminal connection ports that also serve as detectors, storing module restriction information to transmit relevant screen information to connected operation terminals, ensuring only controllable modules are operated based on the operator's position and authority, preventing unintended access to modules on the opposite side.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If operation terminals are provided at multiple locations (front side and rear side) of the semiconductor manufacturing apparatus, then operators can conveniently control the apparatus from their respective positions, but operators may inadvertently control modules on the opposite side leading to safety risks
Solution Approach 1:
The patent applies local quality by assigning different controllable module sets to operation terminals based on their connection port location. The control device determines which modules are controllable based on the specific terminal connection port being used, ensuring that operators can conveniently access the system from their position while only controlling modules appropriate to their location. This resolves the contradiction by making the controllable module set location-dependent rather than uniform across all terminals.
2Adaptability or versatility
If all modules are accessible from all operation terminals, then complete system control is available, but operators cannot be aware of modules they should not operate, creating safety hazards
Solution Approach 1:
The patent implements dynamics by making the set of controllable modules dynamic and context-dependent rather than static and universal. The control device dynamically determines which modules are controllable based on real-time information about which terminal connection port the operation terminal is connected to. This allows the system to adapt its control permissions based on the operator's location, maintaining versatility while ensuring safety through location-aware module accessibility.
3Reliability
If the control device restricts module access based on terminal connection port, then operator safety is improved, but the system becomes more complex in determining and enforcing restrictions
Solution Approach 1:
The patent applies universality by making the terminal connection ports serve multiple functions: they act as both physical connection interfaces for operation terminals and as detectors for identifying which terminal is connected. This multi-functionality simplifies the control logic because the same hardware component provides both connection and detection capabilities, reducing the need for separate detection mechanisms and simplifying the overall control system architecture.
Data Source
AI summary
A control device controls the semiconductor manufacturing apparatus having modules based on an operation from a user on an operation terminal displaying an operation screen of the semiconductor manufacturing apparatus. The semiconductor manufacturing apparatus includes: ports to which the operation terminal is to be connected; and detectors detecting the operation terminal connected to the ports, the ports serving as the detectors or the detectors being provided around the ports. The control device stores restriction information, the restriction information indicating controllable modules corresponding to the detectors in units of the detector; and when the operation terminal is connected to one of the ports and the operation terminal is detected via the corresponding detector, transmits screen information about the operation screen to the connected operation terminal based on the restriction information, the screen information including information indicating the controllable modules corresponding to the detector used for the detection.