Positioning Apparatus Beam Gap Control

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Solution Overview

Problem

In positioning apparatuses used in exposure and semiconductor manufacturing, the non-contact state between I cores and E cores can be disrupted, leading to wear, damage, and impaired smooth movement, which affects accurate positioning and throughput.

Innovation Solution

The introduction of a position regulator, such as stoppers or air pads, to maintain a minimum gap between the beam and the movable member, preventing contact and ensuring smooth movement by controlling the positional relationship through electromagnetic forces or gas pressure, and using bearings with buffer members to absorb impacts.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the non-contact state between I cores and E cores is maintained through electromagnetic forces, then smooth movement and positioning accuracy are improved, but the system becomes vulnerable to contact disruption causing wear and damage

Engineering Contradiction:

Improvesmooth movementVSAvoidwear and damage

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent introduces a position regulator (stopper) that maintains a predetermined safe distance between the I core and E core before contact can occur. This preventive measure cushions against potential harmful contact by establishing a safety margin in advance, allowing the electromagnetic actuator to operate reliably without risking wear or damage to the cores.

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

Solution Approach 2:

The position regulator acts as an intermediary element between the I core and E core, physically preventing direct contact between these critical components. This mediator ensures that the electromagnetic forces can operate without the harmful effect of direct contact, while still maintaining the structural relationship between the moving and stationary parts.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Reliability

If a position regulator is introduced to prevent contact between components, then wear and damage are reduced, but the device complexity increases

Engineering Contradiction:

Improvecomponent durabilityVSAvoidstructure complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The position regulator is designed as a simple, inexpensive mechanical stopper that can be easily manufactured and replaced if needed. By using a low-cost protective element, the system gains enhanced reliability without significant complexity increase, as the stopper is a straightforward mechanical feature rather than a complex active component.

Inventive Principle:

Principle #27Cheap short-living objects (Disposable)

3Measurement precision

If the gap between I core and E core is minimized for precision, then positioning accuracy is improved, but the risk of contact and damage increases

Engineering Contradiction:

Improvepositioning accuracyVSAvoidcontact risk

Core Design Contradiction:

Measurement precisionVSObject-affected harmful factors

Solution Approach 1:

The position regulator establishes a predetermined safe distance that is optimized for the specific application. This cushioning distance is calculated to be sufficient to prevent contact under normal operating conditions and unexpected disturbances, while being minimal enough to maintain the required positioning accuracy for the exposure apparatus.

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Prevents wear and damage to components, maintaining accurate and high-speed positioning, thereby enhancing the operational reliability and efficiency of the positioning apparatus.

Implementation Method 1

an actuator, which generates a force between the beam and the movable member, to control a positional relationship between the beam and the movable member

Methodology Applied

Scientific EffectElectromagnetic force: Lorentz Force

Implementation Method 2

The introduction of a position regulator, such as stoppers or air pads, to maintain a minimum gap between the beam and the movable member

Methodology Applied

Scientific EffectMechanical constraint: Mechanical Force

Implementation Method 3

The introduction of a position regulator, such as stoppers or air pads, to maintain a minimum gap between the beam and the movable member

Methodology Applied

Scientific EffectGas pressure: Pressure Increase

Implementation Method 4

using bearings with buffer members to absorb impacts

Methodology Applied

Scientific EffectImpact absorption: Damping

Data Source

PatentUS7602091B2Positioning apparatus and exposure apparatus

Publication Date: 2009.10.13 CANON KK

AI summary

A positioning apparatus includes a beam which is driven in a first direction that is perpendicular to the longitudinal direction of the beam, a movable member which surrounds at least a part of the beam and moves with the beam moving in the first direction, an actuator which generates a force in the first direction between the beam and the movable member to control a positional relationship in the first direction between the beam and the movable member, and a position regulator arranged between the beam and the movable member and which regulates the positional relationship in the first direction between the beam and the movable member.