Positioning Stage Damping via Perpendicular Rotation
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Solution Overview
Problem
High acceleration and deceleration of positioning devices in precision manufacturing cause vibrations that misalign functional units, making it difficult to maintain precision and productivity, especially with increasing integrated circuit density and feature size requirements.
Innovation Solution
A damping apparatus with a motion transformation device that rotates the positioning stage about a perpendicular axis and uses resilient elements to reduce vibration transmission, along with a positioning mechanism for restoring the stage to its equilibrium orientation using a damping and locking mechanism and positioning actuators.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If high acceleration and deceleration are used to increase productivity, then production throughput increases, but vibration is generated that misaligns functional units and reduces manufacturing precision
Solution Approach 1:
The patent converts the harmful reaction forces generated during high acceleration into useful rotational motion. The motion transformation device rotates the positioning stage about a perpendicular axis in response to acceleration/deceleration forces, transforming linear reaction forces into controlled rotational movement that can be dampened and restored, thereby eliminating vibration while maintaining high acceleration performance
Solution Approach 2:
The patent changes the operational parameters of the positioning stage by introducing rotational degrees of freedom perpendicular to the motion axis. By allowing and controlling rotation about perpendicular axes during acceleration events, the system transforms the vibration problem into a controlled rotational parameter that can be managed through the damping apparatus, enabling high acceleration without precision loss
2Object-affected harmful factors
If reaction masses or force cancellation mechanisms are added to reduce vibration, then vibration transmission is reduced, but device complexity and assembly size increase significantly
Solution Approach 1:
The damping apparatus serves multiple functions: it transforms motion, dampens vibration, and enables position restoration all through a single integrated structure. The motion transformation device simultaneously converts linear reaction forces into rotational motion while the resilient elements provide vibration damping, eliminating the need for separate reaction masses or force cancellation mechanisms
Solution Approach 2:
The motion transformation device acts as an intermediary between the positioning stage and the support structure. Instead of directly counteracting reaction forces with large masses, the device mediates by transforming the forces into rotational motion that can be passively dampened by resilient elements, significantly reducing the complexity and size of the vibration reduction system
3Object-affected harmful factors
If the positioning stage is allowed to rotate to transform reaction forces, then vibration is reduced, but position restoration becomes difficult without a determinable reference point
Solution Approach 1:
The positioning mechanism provides feedback control by detecting the rotational position of the stage and actively restoring it to the equilibrium orientation. The system continuously monitors the stage orientation after rotation and applies corrective forces to return the stage to its reference position, ensuring precise position restoration despite the rotational motion used for vibration reduction
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively reduces vibration transmission and enables precise position restoration without major modifications to existing stage devices, maintaining precision and productivity during high acceleration motion.
Implementation Method 1
a motion transformation device operative to rotate the positioning stage about a rotary axis that is substantially perpendicular to the motion axis in response to forces generated to the positioning stage during acceleration or deceleration
Implementation Method 2
resilient elements connected to the positioning stage to reduce vibration transmission
Implementation Method 3
resilient elements connected to the positioning stage to reduce vibration transmission
Data Source
AI summary
A damping apparatus is provided for a positioning stage that is operative to move and position an object along a motion axis. The damping apparatus comprises a motion transformation device operative to rotate the positioning stage about a rotary axis that is substantially perpendicular to the motion axis, in response to forces generated to the positioning stage during acceleration or deceleration thereof. Resilient elements connected to the positioning stage serve to reduce transmission of vibration generated from the positioning stage.