Powder Raw Material Replenishing Mechanism Vacuum Transfer
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Solution Overview
Problem
Existing raw material gas supply systems face challenges in preventing exposure of powder raw materials to the atmosphere during replenishment, which can lead to oxidation and affect the quality of semiconductor manufacturing processes, despite measures like purging pipes, stricter quality requirements demand more rigorous techniques.
Innovation Solution
A powder raw material replenishing mechanism that includes a pipe connected to a powder raw material supply apparatus, a detachable cartridge, an opening/closing part, and a vacuum exhauster to maintain a vacuum environment, ensuring the powder raw material is transferred without exposure to air by using an inert gas as a carrier.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If powder raw material is replenished using conventional methods with pipe purging, then the replenishment process can be completed, but the powder raw material is exposed to atmosphere causing oxidation and quality degradation
Solution Approach 1:
The patent applies vacuum environment instead of inert atmosphere to prevent oxidation. The vacuum exhauster creates a vacuum state in the pipe and replenishment chamber, removing oxygen and other atmospheric gases that would cause oxidation of the powder raw material during the replenishment process.
Solution Approach 2:
The vacuum exhauster operates before and during the replenishment process to pre-establish and maintain a vacuum environment. This preliminary action ensures that the pipe and chamber are evacuated of atmospheric gases before the powder raw material is transferred, preventing oxidation from the outset.
2Reliability
If vacuum exhauster is used to maintain vacuum environment during replenishment, then atmosphere exposure is prevented, but device complexity increases due to additional vacuum maintenance components
Solution Approach 1:
The patent merges the vacuum maintenance function with the existing replenishment mechanism structure. The vacuum exhauster is integrated into the replenishment chamber and pipe system, combining the vacuum maintenance function with the powder transfer function rather than adding completely separate systems.
Solution Approach 2:
The opening/closing part acts as an intermediary valve that controls the connection between the pipe and replenishment chamber. It mediates the vacuum environment by opening to allow powder transfer while closing to maintain vacuum, simplifying the control of the vacuum system during the replenishment process.
3Ease of operation
If opening/closing part is used to control powder transfer, then powder can be transferred in vacuum environment, but the mechanism becomes more complex with additional control components
Solution Approach 1:
The opening/closing part is designed to automatically respond to the replenishment process requirements. It opens to allow powder transfer when needed and closes to maintain vacuum without requiring complex external control systems, enabling the mechanism to self-regulate the vacuum environment during replenishment.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively prevents exposure of the powder raw material to the atmosphere, maintaining its quality by ensuring it is transferred in a sealed and vacuumed environment, reducing oxidation risks and adhering to stringent quality demands.
Implementation Method 1
a vacuum exhauster configured to evacuate an interior of the pipe and keep the interior of the pipe at a vacuum
Implementation Method 2
a vaporization apparatus that receives and vaporizes a powder raw material
Data Source
AI summary
A powder raw material replenishing mechanism for replenishing a powder raw material to a powder raw material supply apparatus includes: a pipe having one end connected to the powder raw material supply apparatus; a powder raw material cartridge filled with the powder raw material; a connector provided at the other end of the pipe such that the powder raw material cartridge is detachably connected to the connector; an opening/closing part provided in the pipe to open and close between the pipe and the powder raw material cartridge; and a vacuum exhauster for evacuating the pipe to keep the interior of the pipe at a vacuum. In such a vacuum state, the powder raw material cartridge is connected to the connector and the opening/closing part is opened so that the powder raw material inside the powder raw material cartridge is transferred to the powder raw material supply apparatus.