Powder Supply Apparatus Spiral Air Flow Plating

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Solution Overview

Problem

Conventional powder supply apparatuses for plating systems face issues with powder scattering, leading to contamination in clean rooms and inefficiencies in powder delivery to plating solution tanks, especially when installed within the same space as the plating apparatus.

Innovation Solution

A powder supply apparatus incorporating a plating solution tank, a feed pipe, and a spiral-air-flow-generating component or a curtain generating component to minimize powder scattering by creating a spiral air flow or a tubular curtain of plating solution to cover the feed pipe outlet, preventing powder from scattering and ensuring efficient delivery.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If powder is fed directly into the plating solution tank, then the powder delivery efficiency is improved, but powder scatters around the outside of the apparatus causing contamination

Engineering Contradiction:

Improvepowder delivery efficiencyVSAvoidpowder scattering and contamination

Core Design Contradiction:

ProductivityVSObject-generated harmful factors

Solution Approach 1:

A feed pipe is introduced as an intermediary component to transport powder from the storage container to the plating solution tank. The feed pipe serves as a controlled conduit that prevents direct exposure of powder to the surrounding environment, thereby eliminating scattering and contamination while maintaining efficient delivery throughput.

Inventive Principle:

Principle #24Intermediary (Mediator)

Solution Approach 2:

A hood structure is implemented to cover and enclose the feed pipe and plating solution tank opening. This flexible enclosure creates a contained space that traps any potential powder escape, directing it back into the tank while allowing access for operation and maintenance.

Inventive Principle:

Principle #30Flexible shells and thin films

2Object-generated harmful factors

If the powder supply apparatus is installed in a space different from the clean room, then powder scattering is prevented, but the apparatus cannot be installed when space is unavailable

Engineering Contradiction:

Improvepowder scattering preventionVSAvoidinstallation location flexibility

Core Design Contradiction:

Object-generated harmful factorsVSAdaptability or versatility

Solution Approach 1:

Inventive Principle:

Principle #30Flexible shells and thin films

Solution Approach 2:

The system creates a controlled environment around the powder handling area using the hood structure, effectively isolating the powder from the surrounding clean room atmosphere. This allows the apparatus to be installed within the clean room without compromising the clean environment.

Inventive Principle:

Principle #39Inert atmosphere (Inert environment)

3Object-generated harmful factors

If powder scatters inside the apparatus, then the clean room contamination is avoided, but the scattered powder fails to be fed and becomes wasteful

Engineering Contradiction:

Improveclean room contamination avoidanceVSAvoidpowder waste

Core Design Contradiction:

Object-generated harmful factorsVSLoss of substance

Solution Approach 1:

The hood structure, initially designed to prevent contamination, is enhanced to also recover scattered powder. By configuring the hood with appropriate airflow and collection mechanisms, scattered powder that would otherwise be wasted is redirected back into the plating solution tank, converting a harmful effect into a beneficial recovery process.

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

Solution Approach 2:

The system incorporates a feedback mechanism where scattered powder is detected and redirected back into the feed system. The hood structure creates a recirculation path that feeds scattered powder back to the source, ensuring that no powder is lost and maintaining efficient utilization of the material.

Inventive Principle:

Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively reduces powder scattering and ensures that the powder is efficiently fed into the plating solution tank, preventing wastage and maintaining a clean environment, even when the apparatus is installed in the same space as the plating apparatus.

Implementation Method 1

The spiral-air-flow-generating component is configured to receive the gas from the gas supply line to generate a spiral air flow heading toward the plating solution tank inside the feed pipe

Methodology Applied

Scientific EffectSpiral air flow: Vortex Ring

Implementation Method 2

The curtain generating component generates a tubular curtain of the plating solution so as to cover an outlet of the feed pipe

Methodology Applied

Scientific EffectFluid curtain: Fluid Spray

Data Source

PatentUS20250003108A1Powder supply apparatus and plating system

Publication Date: 2025.01.02 EBARA CORP

AI summary

There is provided a powder supply apparatus that prevents powder from scattering as much as possible. There is provided the powder supply apparatus that supplies a powder containing a metal used for a plating to a plating solution. This powder supply apparatus includes a plating solution tank, a feed pipe, a gas supply line, and a spiral-air-flow-generating component. The plating solution tank is configured to house the plating solution. The feed pipe is configured to feed the powder into the plating solution tank. The gas supply line is configured to supply a gas. The spiral-air-flow-generating component is configured to receive the gas from the gas supply line to generate a spiral air flow heading toward the plating solution tank inside the feed pipe.